Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
microsensors mems and smart devices gardner varadhan and awadelkarim pot
... ones
are as
follows:
30 0-
25 0-
I
20 0-
I
15 0-
S
10 0-
5 0-
0
199 0
199 2 199 4
199 6
Year
199 8
2000
2002
Figure
1.4
World
market
for ICs and
microsensors
from
199 0
to
2000.
From
various
... methacrylate)-co-
ethylacrylate]
(COP)
Dichloropropyl acrylate
and
glycidyl
methacrylate-co-ethyl acrylate (DCOPA)
Lithography
Optical
Optical
Optical
E-b...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf
... ones
are as
follows:
30 0-
25 0-
I
20 0-
I
15 0-
S
10 0-
5 0-
0
199 0
199 2 199 4
199 6
Year
199 8
2000
2002
Figure
1.4
World
market
for ICs and
microsensors
from
199 0
to
2000.
From
various
... Remarks
395
References
395
14
MEMS- IDT
Microsensors
397
14.1 Introduction
397
14.2
Principles
of a
MEMS- IDT Accelerometer
398
14.3 Fabricat...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
... 10
-5
168
11.7
190
6 .9
GaAs
5316
1510
10
-1 1
47
12
-
—
SiO
2
1544
1880
-
6. 5-1 1
4. 3-4 .5
380
14
Si
3
N
4
3440
190 0
-
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7.5
380
14
Al
2 699
660
377
236
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50
Au
193 20
1064
488
3 19
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78
200
Ti
4508
1660
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480
"Measured
at
... etc.
0,
1,2,3,
,(n-
1)
-l,-l
+ 1, -l +
2, ,-! ,
0,
l, l-2,l-
1,l
+
ior-I
number
m
s
,...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
... electronic nose (Gardner
and
Bartlett ( 199 9)). Further details
on
such smart devices
are
given
in
Chapter
15.
REFERENCES
Chilton,
J. A. and
Goosey,
M. T.,
eds.
( 199 5).
Special
Polymers
... Electronics
and
Optoelec-
tronics,
Chapman
and
Hall,
London,
p.
351.
Culshaw,
B.
( 199 6).
Smart
Structures
and
Materials,
Artech
House,
Boston,
p.
2 09.
Ga...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf
... test
Reworkability
Die
attach
and
wire
bond
1
30 0-5 00
2 0-1 00
2. 0-3 .5
4-7
Excellent
DC
Poor
TAB
>2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Poor/Fair
Flip
TAB
>2
50 0-7 00
3-4
4. 0-5 .0
3-4
Fair
AC
Fair
Flip
Chip
0.8
1000
10
<1.0
10
Poor
AC
Poor
basic
... n-p-n
transistor:
(a)
common-emitter;
(b)
common-base;
and (c)
common-collector
MO...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf
... conductivity
Units
%
-
1 0-
6
/°C
g/cm
3
-
10
–3
kV/mm
GPa
ft-cm
J/g.°K
W/m.°K
AI
2
O
3
99 .5
White
7.6
3.87
9. 9
0.1
24
400
10
14
-
2 0-3 5
AI
2
O
3
96
White
7.1
3.7
9. 5
0.4
26
250
10
14
-
2 0-3 5
BeO
99 .5
White
9. 0
3.01
6.5
0.4
9. 5
17 0-2 40
10
15
-
25 0-2 60
A1N
9 8 -9 9. 8
Dark
... conductivity
Units
%
-
1 0-
6
/°C
g/cm
3
-
10
–3...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
... S.
( 199 7). "Two-photon-absorbed photopolymerisation
for
three-
dimensional
microfabrication," Proc.
IEEE
MEMS, 1 69 174.
Monneret,
S.,
Loubere,
V. and
Corbel,
S.
( 199 9). "Microstereolithography ... and
Actuators
A, 62,
741–747.
Bau,
H. H. et al.
( 199 8). "Ceramic tape-based meso systems technology," ASME MEMS,
66.
491 – 498 .
Beluze,
L.,...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx
... control
9
9
9
9
n/a
7
9
30
100
3.3
97
455
14
19
0-1 05
5 0-1 05
0-1 05
0-1 05
500
20000
5 0-1 05
Current
Current
198 9
199 4
199 4-1 99 5
199 4-1 99 5
Current
devices have
an
accuracy
of
0.01
percent root-mean-square ... vans
ABS
a
Suspension
Total
199 1
21
0
0
21
199 2
55
8
6
69
199 3
89
8
13
110
199 4
88
16
18
122
199 5
151
24
26
201
199 6
127...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps
... B.,
King,
T. and
Niles,
L.
( 199 1). Silicon monolithic micromechanical gyro-
scope,
Proceedings
of
Transducers &apos ;91 , July,
San
Fransisco,
pp.
96 6 -9 69.
Hanna,
S. M.
( 198 7). "Magnetic
... Publishing, Bristol,
pp.
99 9- 1 002.
Boside,
G. and
Harmer,
A.
( 199 6).
Chemical
and
Biochemical Sensing with Optical Fibers
and
Waveguides,
Artech
House...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps
... pp.
52 1-5 23.
Grate,
J. W.,
Martin,
S. J. and
White,
R. M.
( 199 3a). "Acoustic wave microsensors, Part
I,"
Analyt-
ical
Chem.,
65,
94 0 -9 48.
Grate,
J. W.,
Martin,
S. J. and
... operation
Device
type
Love
SAW
Rayleigh
SAW
SH-SAW SH-APM
FPW
Substrate
Typical
frequency
(MHz)
ST-quartz ST-quartz LiTaO
3
ST-quartz Si
x
N
y
/ZnO
9 5-1 30
8 0-1 000
9...
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