Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf

... (um) 0. 1-1 0 0. 3-1 00 0. 1-0 .5 0. 1-0 .3 Bake temperature (°C) 9 0-1 50 35 0-4 50 50 0-9 00 650 Solvent Weak base Weak base HF HNO 3 Table 2.4 Commercially available resists Resist Kodak 747 AZ-1 350 J PR 102 Poly(methyl ... (MST); the main ones are as follows: 30 0- 25 0- I 20 0- I 15 0- S 10 0- 5 0- 0 1990 1992 1994 1996 Year 19...

Ngày tải lên: 27/06/2014, 18:20

... soild-state device physics, micro- electronics, material science, MEMS/ Smart structures, and mechanics. Prior to joining About the Authors INTRODUCTION Dimension of object -1 0 -9 -8 – 7-6 - 5- 4 ... 129809 Library of Congress Cataloguing-in-Publication Data Gardner, J. W. (Julian W.), 1 95 8- Microsensors, MEMS, and smart devices / Julian...

Ngày tải lên: 10/08/2014, 05:20

... 10 -5 168 11.7 190 6.9 GaAs 53 16 151 0 10 -1 1 47 12 - — SiO 2 154 4 1880 - 6. 5- 1 1 4. 3-4 .5 380 14 Si 3 N 4 3440 1900 - 19 7 .5 380 14 Al 2699 660 377 236 - 70 50 Au 19320 1064 488 319 - 78 200 Ti 450 8 1660 26 22 - -4 0 480 "Measured ... (um) 0. 1-1 0 0. 3-1 00 0. 1-0 .5 0. 1-0 .3 Bake temperature (°C) 9 0-1 50 35 0-4 50...

Ngày tải lên: 10/08/2014, 05:20

... (mm) Total thickness variation (u,m) Surface orientation 0 .5 0-0 .55 3 0-3 5 1 6-2 0 0.6 0-0 . 65 4 0-4 5 2 5- 3 0 70 65 0.6 5- 0 .70 5 5- 6 0 3 5- 4 0 60 50 (100) or (111) (100) or (111) (100) or (111) "Wafer ... (ºC) 1 150 –12 25 102 5- 1 100 1100–11 75 95 0-1 050 Dopant type n n P Deposition rate L(um/min) 0. 2-1 .0 0. 1-1 .0 0. 2-2...

Ngày tải lên: 10/08/2014, 05:20

... test Reworkability Die attach and wire bond 1 30 0 -5 00 2 0-1 00 2. 0-3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3-4 4. 0 -5 .0 3-4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3-4 4. 0 -5 .0 3-4 Fair AC Fair Flip Chip 0.8 1000 10 <1.0 10 Poor AC Poor basic ... 102 COP PMMA PBS Lithography Optical Optical Optical Optical E-beam and X-ray E-beam...

Ngày tải lên: 10/08/2014, 05:20

... 10+ 0. 2-0 .3 3.0 90 4.3 HTCC MCM-C Alumina 9 .5 10 0-7 50 10 0-2 00 W(Co) 15 10 0-1 25 25 0-6 25 20 0-3 00 50 + 0. 8-1 10.0 102 2.1 Adapted from Doane and Franzon Thin film MCM-D Polyimide 3 .5 25 25 Cu ... film MCM-D Polyimide 3 .5 25 25 Cu (Al, Au) 5 1 0-2 5 5 0-1 25 100 4-to 10 1. 3-3 .4 3.4 62 1. 25 Laminate MCM-L Epoxy-glass 4.8 120 30...

Ngày tải lên: 10/08/2014, 05:20

... (1998). "AMANDA-low-cost production of microfluidic devices, " Sensors and Actuators A, 70, 15 3-1 58 . Sun, C., Jiang, X. N. and Zhang, X. (1999). "Experimental and numerical ... types of MEMS RADIATION SENSORS 241 Radition sensors Number particles X ray X ray - Plastic film - Thermoluminescent - Solid-state -Photoconductive -Photovolt...

Ngày tải lên: 10/08/2014, 05:20

... control 9 9 9 9 n/a 7 9 30 100 3.3 97 455 14 19 0-1 05 5 0-1 05 0-1 05 0-1 05 500 20000 5 0-1 05 Current Current 1989 1994 199 4-1 9 95 199 4-1 9 95 Current devices have an accuracy of 0.01 percent root-mean-square (rms) or ... g -4 0 to 1 05 5 400 0 .5 N/A 7.8 16-pin DIP, SIP 11 Bosch SMB 050 1 ± 35 g - - 7 400 0 .5 N/A - 28-pin PLCC N/A...

Ngày tải lên: 10/08/2014, 05:20

... quality (smoke) Toxic gas - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0-1 0000 5- 1 00 <10 1 0-1 000 1 0-1 000 0 -5 0-0 .3 (Power mW) 8 35 660 660 120 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price for ... k 1 and 2 defined in Equations (8 .50 ) and (8 .51 ). AG oc -C r (8 .53 ) where the exponent r has a value that lies between 0 .5...

Ngày tải lên: 10/08/2014, 05:20

... operation Device type Love SAW Rayleigh SAW SH-SAW SH-APM FPW Substrate Typical frequency (MHz) ST-quartz ST-quartz LiTaO 3 ST-quartz Si x N y /ZnO 9 5- 1 30 8 0-1 000 9 0-1 50 160 1-6 Ua U b t Media Transverse Parallel Ice ... Transducers ' 95, vol. 2, IEEE, pp. 52 1 -5 23. Grate, J. W., Martin, S. J. and White, R. M. (1993a). "Acoustic wave microsensor...

Ngày tải lên: 10/08/2014, 05:20