Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf

... 2.2 1.46 1.44 1.46 1.46 >10 -5 8 x 10 -6 10 -5 10 -5 CONTENTS ix 8.7 Concluding Remarks 30 0 References 30 0 9 Introduction to SAW Devices 30 3 9.1 Introduction 30 3 9.2 Saw Device Development and History 30 3 9 .3 ... 23 2.5 Doping Semiconductors 27 2.5.1 Diffusion 30 2.5.2 Ion Implantation 31 2.6 Concluding Remarks 32 References 34...

Ngày tải lên: 27/06/2014, 18:20

... via Coupled-mode Theory 36 0 13. 3 Wireless SAW-based Microsensors 36 4 13. 4 Applications 36 7 13. 4.1 Strain Sensor 36 7 13. 4.2 Temperature Sensor 37 1 13. 4 .3 Pressure Sensor 37 5 13. 4.4 Humidity ... Waveguide Layer 35 3 12 .3. 1 Introduction 35 3 12 .3. 2 TMS PECVD Process and Conditions 35 4 12.4 Concluding Remarks 35 8 References 35 8 13 IDT Mi...

Ngày tải lên: 10/08/2014, 05:20

... 10 -5 168 11.7 190 6.9 GaAs 531 6 1510 10 -1 1 47 12 - — SiO 2 1544 1880 - 6. 5-1 1 4. 3- 4 .5 38 0 14 Si 3 N 4 34 40 1900 - 19 7.5 38 0 14 Al 2699 660 37 7 236 - 70 50 Au 1 932 0 1064 488 31 9 - 78 200 Ti 4508 1660 26 22 - -4 0 480 "Measured at ... 2, 3, 4, etc. 0, 1,2 ,3, ,(n- 1) -l,-l + 1, -l + 2, ,-! , 0, l, l-2,l- 1,l + ior-...

Ngày tải lên: 10/08/2014, 05:20

... (mm) Total thickness variation (u,m) Surface orientation 0.5 0-0 .55 3 0 -3 5 1 6-2 0 0.6 0-0 .65 4 0-4 5 2 5 -3 0 70 65 0.6 5-0 .70 5 5-6 0 3 5-4 0 60 50 (100) or (111) (100) or (111) (100) or (111) "Wafer ... gases: Arsine Phosphine Diborane Formula SiCl 4 SiH 2 Cl 2 SiHCl 3 SiH 4 AsH 3 PH 3 B 2 H 6 Deposition temperature T (ºC) 1150–1225 102 5-1...

Ngày tải lên: 10/08/2014, 05:20

... test Reworkability Die attach and wire bond 1 30 0-5 00 2 0-1 00 2. 0 -3 .5 4-7 Excellent DC Poor TAB >2 50 0-7 00 3- 4 4. 0-5 .0 3- 4 Fair AC Poor/Fair Flip TAB >2 50 0-7 00 3- 4 4. 0-5 .0 3- 4 Fair AC Fair Flip Chip 0.8 1000 10 <1.0 10 Poor AC Poor basic ... 102 COP PMMA PBS Lithography Optical Optical Optical Optical E-beam and X-ray E-beam...

Ngày tải lên: 10/08/2014, 05:20

... conductivity a Young's modulus Units ppm/°C - - °C W/m.°K GPa Epoxy 58 4.5 0 .35 130 0 .3 3.4 Polyimide 49 4 .3 0 .33 260 0 .3 4.1 Cyanate ester 55 3. 8 0 .35 260 0 .3 3.4 PTFE 99 2.6 0.46 - 0 .3 0. 03 a Approximate values number ... conductivity Units % - 1 0- 6 /°C g/cm 3 - 10 3 kV/mm GPa ft-cm J/g.°K W/m.°K AI 2 O 3 99.5 White 7.6 3. 87 9.9 0....

Ngày tải lên: 10/08/2014, 05:20

... types of MEMS RADIATION SENSORS 241 Radition sensors Number particles X ray X ray - Plastic film - Thermoluminescent - Solid-state -Photoconductive -Photovoltaic -Photoconductive - Photovoltaic " ... (1998). "AMANDA-low-cost production of microfluidic devices, " Sensors and Actuators A, 70, 15 3- 1 58. Sun, C., Jiang, X. N. and Zhang, X....

Ngày tải lên: 10/08/2014, 05:20

... density (mg/Hz) Package" Price(€)* Motorola XMMAS4 01G1D 1 ±40 g 20 g -4 0 to 105 5 400 0.5 N/A 7.8 16-pin DIP, SIP 11 Bosch SMB050 1 35 g - - 7 400 0.5 N/A - 28-pin PLCC N/A Bosch SMB060 2 35 g - - 12 400 0.5 1 - 28-pin PLCC N/A Analog devices ADXL50JH 1 ±50 ... control 9 9 9 9 n/a 7 9 30 100 3. 3 97 455 14 19 0-1 05 5 0-1 05 0-1 05 0-1 05 500 2...

Ngày tải lên: 10/08/2014, 05:20

... SnO 2 Undoped oxide Undoped oxide Measurand Methane Hydrogen sulfide Air quality (smoke) Toxic gas - CO Hydrocarbons Chlorine Ozone Range (PPM) 50 0-1 0000 5-1 00 <10 1 0-1 000 1 0-1 000 0-5 0-0 .3 (Power mW) 835 660 660 120 400 650 800 Cost a (euro) 13 50 13 13 15 25 25 a Price ... Shurmer, H. V. and Gardner, J. W. (19 93) . "Integrated tin ox...

Ngày tải lên: 10/08/2014, 05:20

... compar- ison of their operation Device type Love SAW Rayleigh SAW SH-SAW SH-APM FPW Substrate Typical frequency (MHz) ST-quartz ST-quartz LiTaO 3 ST-quartz Si x N y /ZnO 9 5-1 30 8 0-1 000 9 0-1 50 ... displacements u 1x2 and u 2x2 in the plane Jt3 = 0 (Ewing et al. 1957; Slobodnik 1976). INTRODUCTION TO ACOUSTICS 32 1 y-polarized x-polarized z-polarized x-propa z-po...

Ngày tải lên: 10/08/2014, 05:20