Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
microsensors mems and smart devices gardner varadhan and awadelkarim pot
... 2.2
1.46
1.44
1.46
1.46
>10
-5
8 x
10
-6
10
-5
10
-5
CONTENTS
ix
8.7
Concluding Remarks
30 0
References
30 0
9
Introduction
to SAW
Devices
30 3
9.1
Introduction
30 3
9.2 Saw
Device Development
and
History
30 3
9 .3 ... 23
2.5
Doping Semiconductors
27
2.5.1
Diffusion
30
2.5.2
Ion
Implantation
31
2.6
Concluding Remarks
32
References
34...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 1 pdf
... via
Coupled-mode Theory
36 0
13. 3 Wireless SAW-based Microsensors
36 4
13. 4 Applications
36 7
13. 4.1 Strain Sensor
36 7
13. 4.2 Temperature Sensor
37 1
13. 4 .3 Pressure Sensor
37 5
13. 4.4
Humidity ... Waveguide Layer
35 3
12 .3. 1 Introduction
35 3
12 .3. 2
TMS
PECVD
Process
and
Conditions
35 4
12.4 Concluding Remarks
35 8
References
35 8
13
IDT
Mi...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 2 ppt
... 10
-5
168
11.7
190
6.9
GaAs
531 6
1510
10
-1 1
47
12
-
—
SiO
2
1544
1880
-
6. 5-1 1
4. 3- 4 .5
38 0
14
Si
3
N
4
34 40
1900
-
19
7.5
38 0
14
Al
2699
660
37 7
236
-
70
50
Au
1 932 0
1064
488
31 9
-
78
200
Ti
4508
1660
26
22
-
-4 0
480
"Measured
at
... 2, 3, 4,
etc.
0,
1,2 ,3,
,(n-
1)
-l,-l
+ 1, -l +
2, ,-! ,
0,
l, l-2,l-
1,l
+
ior-...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 3 pdf
... (mm)
Total thickness
variation
(u,m)
Surface
orientation
0.5 0-0 .55
3 0 -3 5
1 6-2 0
0.6 0-0 .65
4 0-4 5
2 5 -3 0
70
65
0.6 5-0 .70
5 5-6 0
3 5-4 0
60
50
(100)
or
(111)
(100)
or
(111)
(100)
or
(111)
"Wafer
... gases:
Arsine
Phosphine
Diborane
Formula
SiCl
4
SiH
2
Cl
2
SiHCl
3
SiH
4
AsH
3
PH
3
B
2
H
6
Deposition
temperature
T (ºC)
1150–1225
102 5-1...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 4 pdf
... test
Reworkability
Die
attach
and
wire
bond
1
30 0-5 00
2 0-1 00
2. 0 -3 .5
4-7
Excellent
DC
Poor
TAB
>2
50 0-7 00
3- 4
4. 0-5 .0
3- 4
Fair
AC
Poor/Fair
Flip
TAB
>2
50 0-7 00
3- 4
4. 0-5 .0
3- 4
Fair
AC
Fair
Flip
Chip
0.8
1000
10
<1.0
10
Poor
AC
Poor
basic
... 102
COP
PMMA
PBS
Lithography
Optical
Optical
Optical
Optical
E-beam
and
X-ray
E-beam...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 5 pdf
... conductivity
a
Young's
modulus
Units
ppm/°C
-
-
°C
W/m.°K
GPa
Epoxy
58
4.5
0 .35
130
0 .3
3.4
Polyimide
49
4 .3
0 .33
260
0 .3
4.1
Cyanate
ester
55
3. 8
0 .35
260
0 .3
3.4
PTFE
99
2.6
0.46
-
0 .3
0. 03
a
Approximate values
number
... conductivity
Units
%
-
1 0-
6
/°C
g/cm
3
-
10
3
kV/mm
GPa
ft-cm
J/g.°K
W/m.°K
AI
2
O
3
99.5
White
7.6
3. 87
9.9
0....
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 9 ppt
... types
of
MEMS
RADIATION
SENSORS
241
Radition
sensors
Number
particles
X
ray
X
ray
-
Plastic
film
-
Thermoluminescent
-
Solid-state
-Photoconductive
-Photovoltaic
-Photoconductive
-
Photovoltaic
"
... (1998). "AMANDA-low-cost production
of
microfluidic
devices, " Sensors
and
Actuators
A, 70,
15 3- 1 58.
Sun,
C.,
Jiang,
X. N. and
Zhang,
X....
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 10 docx
... density
(mg/Hz)
Package"
Price(€)*
Motorola
XMMAS4
01G1D
1
±40 g
20 g
-4 0 to 105
5
400
0.5
N/A
7.8
16-pin
DIP,
SIP
11
Bosch
SMB050
1
35 g
-
-
7
400
0.5
N/A
-
28-pin
PLCC
N/A
Bosch
SMB060
2
35 g
-
-
12
400
0.5
1
-
28-pin
PLCC
N/A
Analog
devices
ADXL50JH
1
±50 ... control
9
9
9
9
n/a
7
9
30
100
3. 3
97
455
14
19
0-1 05
5 0-1 05
0-1 05
0-1 05
500
2...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 11 pps
... SnO
2
Undoped
oxide
Undoped
oxide
Measurand
Methane
Hydrogen
sulfide
Air
quality
(smoke)
Toxic
gas -
CO
Hydrocarbons
Chlorine
Ozone
Range
(PPM)
50 0-1 0000
5-1 00
<10
1 0-1 000
1 0-1 000
0-5
0-0 .3
(Power
mW)
835
660
660
120
400
650
800
Cost
a
(euro)
13
50
13
13
15
25
25
a
Price
... Shurmer,
H. V. and
Gardner,
J. W.
(19 93) .
"Integrated
tin
ox...
Microsensors, MEMS and Smart Devices - Gardner Varadhan and Awadelkarim Part 12 pps
... compar-
ison
of
their operation
Device
type
Love
SAW
Rayleigh
SAW
SH-SAW SH-APM
FPW
Substrate
Typical
frequency
(MHz)
ST-quartz ST-quartz LiTaO
3
ST-quartz Si
x
N
y
/ZnO
9 5-1 30
8 0-1 000
9 0-1 50
... displacements u
1x2
and
u
2x2
in the
plane
Jt3 = 0
(Ewing
et al.
1957; Slobodnik 1976).
INTRODUCTION
TO
ACOUSTICS
32 1
y-polarized
x-polarized
z-polarized
x-propa
z-po...