MEMS Mechanical Sensors - Stephen Beeby Part 15 pptx
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... piezoresistive signal pick-off can be partially overcome by
integrating the read-out electronics on the same chip. A good example is the acceler-
ometer presented by Seidel et al. [15] . The sensing element ... into the
cap-wafers by dry-etching in order to provide near-critical damping. The electronic
read-out circuitry is integrated onto the same chip and was fabricated in a standard
3-...
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... Cataloging-in-Publication Data
A catalog record for this book is available from the U.S. Library of Congress.
British Library Cataloguing in Publication Data
Beeby, Stephen.
MEMS mechanical sensors. — ... mechanical sensors. — (Artech House MEMS library)
1. Microelectricalmechanical systems—Design and construction 2. Transducers
I. Beeby, Stephen
621.3’81
ISBN 1-5 805 3-5 3...
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... is along the z-axis [1],
most crystalline quartz is cut with the z-axis perpendicular to the plane of the wafer.
The property of quartz that makes it useful in MEMS mechanical sensors is that ... thick
-
nesses up to the order of a few micrometers are deposited by optical or electron
beam lithography.
Additional materials used in MEMS mechanical sensors are: ceramics (e.g., al...
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... 3.14 MEMS Pro Complete Suite.
(ROM)
MEMS Modeler
Multiphysics
ANSYS
Foundry
CIF/GDSII
Modeler
Solid
Analytical
equations
VHDL-
AMS
L-Edit Pro
CIF
MEMS Master
MEMS
Figure 3 .15 MEMS Master and MEMS ... was
determined.
3.2.2.4 MEMS Pro /MEMS Xplorer (MEMScAP)
MEMS Pro and MEMS Xplorer are PC and Unix-based CAD tools, respectively,
and are supplied through MEMSCAP. The MEMS...
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... applications is the devel
-
opment of spherical semiconductors. A 1-mm-diameter spherical semiconductor
has three times the surface area of a 1-mm-square chip [35]. Many sensing applica
-
tions have been ... Microelectronic
Engineering, Vol. 50, 2000, pp. 515 523.
[36] Germer, W., and G. Kowalski, Mechanical Decoupling of Monolithic Pressure Sensors in
Small Plastic Encapsulants,”...
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... in
more detail particular aspects relating to MEMS pressure sensors. This review of
traditional diaphragm theory is particularly relevant in the packaging of MEMS
technology pressure sensors. Stainless ... Diaphragm-Based Pressure Sensors
Diaphragms are the simplest mechanical structure suitable for use as a pressure-
sensing element. They are used as a sensor element in both tradit...
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... Sensor,”
Sensors and Actuators, Vol. A66, 1998, pp. 155 159 .
[22] Marek, J., and M. Illing, “Micromachined Sensors for Automotive Applications,” Proc. of
IEEE Sensors 2002, 1st Int. Conf. on Sensors, ... Age for Sili
-
con Sensors and Actuators,” Sensors and Actuators, Vol. A46, 1995, pp. 8–16.
[35] Diem, B., et al., “‘SIMOX’: A Technology for High-Temperature Silicon Sensor...
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... capacitive
force sensor using optical fiber-to-chip coupling has been reported [54]. The sensor
has been designed to operate in the 0- to 50 0- N force range and the 0- to 1 0- Nm
torque range. The intended ... http://www.wt-nci.com/innovations.html,
November 2003.
[15] Whitehead, N., B. E. Jones, and D. Rees, “Non-Contact Torque Measurement on a Rotat
-
ing Shaft Incorporating...
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... in-plane axis (x-axis), which allows relatively
large drive amplitudes. Any angular rate signal about the out-of-plane axis (z-axis)
excites a secondary motion along the other in-plane axis (y-axis). ... includes on-chip charge pumps to boost an applied TTL-
level voltage. Both the ADXRS150 and ADXRS300 are essentially z-axis gyro
-
scopes based on the principle of resonant-tuning-fork gy...
Từ khóa: