MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Vol. 50 , 2000, pp. 51 5 52 3.
[36] Germer, W., and G. Kowalski, Mechanical Decoupling of Monolithic Pressure Sensors in
Small Plastic Encapsulants,” Sensors and Actuators, Vol. A23, 1990, pp. 10 65 1069.
[37] ... 200 35 14
Glass Pb glass 450 –800 0. 25 2 60
Anodic Pyrex/ Borofloat 33 250 50 0 1.09 63
Epoxy Epoxy (Ag loaded) 150 1.2 0.2–27
Thermoplastic Thermoplastic 150 3 0.41
RTV si...
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... 94
5. 4.2 Phase 95
5.4.3 Wavelength 96
5. 4.4 Spatial Position 96
5. 4 .5 Frequency 96
5. 4.6 Polarization 97
5. 5 Resonant Techniques 97
5. 5.1 Vibration Excitation and Detection Mechanisms 98
5. 5.2 ... 71
4 .5 Conclusions 80
References 81
CHAPTER 5
Mechanical Transduction Techniques 85
5.1 Piezoresistivity 85
5.2 Piezoelectricity 89
5. 3 Capacitive Techniques 92
5. 4 Opti...
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... 2.9–3.1
Refractive index 1. 85 2 .5 2.01
Dielectric constant 6–9 6–7
Dielectric strength (10
6
Vcm
−1
)5 10
Resistivity (Ω-cm) 10
6
–10
15
10
16
Energy gap (eV) 4 5 5
Si/N ratio 0.8–1.2 0. 75
hydrogen ions, ... is along the z-axis [1],
most crystalline quartz is cut with the z-axis perpendicular to the plane of the wafer.
The property of quartz that makes it useful in MEMS mechanica...
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... 3.14 MEMS Pro Complete Suite.
(ROM)
MEMS Modeler
Multiphysics
ANSYS
Foundry
CIF/GDSII
Modeler
Solid
Analytical
equations
VHDL-
AMS
L-Edit Pro
CIF
MEMS Master
MEMS
Figure 3. 15 MEMS Master and MEMS ... was
determined.
3.2.2.4 MEMS Pro /MEMS Xplorer (MEMScAP)
MEMS Pro and MEMS Xplorer are PC and Unix-based CAD tools, respectively,
and are supplied through MEMSCAP. The MEMS...
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... Instrum., Vol. 18, 19 85,
pp. 103–1 15.
[5] Greenwood, J. C., “Silicon in Mechanical Sensors, ” J. Phys. E: Sci. Instrum., Vol. 21, 1988,
pp. 1114–1128.
[6] Stemme, G., “ Resonant Silicon Sensors, ” J. Micromech. ... in
more detail particular aspects relating to MEMS pressure sensors. This review of
traditional diaphragm theory is particularly relevant in the packaging of MEMS
tec...
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... Proc. 8th Int. Conf. on Solid State Sensors and Actuators (Transduc
-
ers ’ 95) and Eurosensors IX, Stockholm, Sweden, June 25 29, 19 95, pp. 58 6 58 9.
[ 85]
Beeby S. P., et al., “Micromachined Silicon ... Digest 19 85 Int. Conf. on Solid State Sensors and Actuators
(Transducers ’ 85) , June 11–14, 19 85, Philadelphia, PA, pp. 186–188.
[55 ] Catling, D. C., “High-Sensitivity Sil...
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... piezoresistive
force sensor are used. A 6- m-thick, 25 0- m-wide silicon beam finger has a 30 0- m
stroke and time constant of 11 ms. Gripping force is about 250 µN, and this is
sensed by diffused ... of a Novel Integrated Floating-Electrode-
‘Electret’-Microphone (FEEM),” Proc. 11th IEEE Intl. Workshop on MEMS, Heidelberg,
Germany, June 25 29, 1998, pp. 58 6 59 0.
[114] Li, X., et a...
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... Conf.
Micro Electro Mechanical Systems, Orlando, FL, January 17–21, 1999, pp. 55 8 56 3.
[54 ] Enikov, E. T., and B. J. Nelson, “Three-Dimensional Microfabrication for a Multi-Degree-
of-Freedom Capacitive ... J.
Vehicle Design, Vol. 15, No. 3 5, 1994, pp. 243– 254 .
[37] Zabler, E., et al., “A Non-Contact Strain-Gage Torque Sensor for Automotive Servo-Driven
Steering Systems,” Sensors...
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... Actuators,
Vol. A 25 27, 1991, pp. 55 5 55 8.
[21] Seidel, H., et al., “Capacitive Silicon Accelerometer with Highly Symmetrical Design,” Sen
-
sors and Actuators, Vol. A21–23, 1990, pp. 312–3 15.
[22] McDonald, ... axis
(1.5G, 5G, 50 G,
100G)
Dual axis
(2G, 10G, 50 G)
Analog output; bandwidth dc to 10 kHz;
noise floor from 150 µG/√Hz (1.5G) to 4
mG/√Hz (100G); resolution from 1 mG
(1...
MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... (After: [44, 45] .) (c) The hot wire is made of
100-nm-thick and 5 0- m-long chrome/nickel, suspended above the wafer plane by two 0.4-mm-
long beams. (After: [ 65] .) (d) A gold or platinum thin-film is ... to stand free into the flow [55 ], are placed on very thin
membranes [41, 42, 50 , 51 , 53 , 54 , 56 ], or on bridges crossing the flow path [43, 48,
49]. Often a thin-film of si...