MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Vol. 50 , 2000, pp. 51 5 52 3. [36] Germer, W., and G. Kowalski, Mechanical Decoupling of Monolithic Pressure Sensors in Small Plastic Encapsulants,” Sensors and Actuators, Vol. A23, 1990, pp. 10 65 1069. [37] ... 200 35 14 Glass Pb glass 450 –800 0. 25 2 60 Anodic Pyrex/ Borofloat 33 250 50 0 1.09 63 Epoxy Epoxy (Ag loaded) 150 1.2 0.2–27 Thermoplastic Thermoplastic 150 3 0.41 RTV si...
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MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... 94 5. 4.2 Phase 95 5.4.3 Wavelength 96 5. 4.4 Spatial Position 96 5. 4 .5 Frequency 96 5. 4.6 Polarization 97 5. 5 Resonant Techniques 97 5. 5.1 Vibration Excitation and Detection Mechanisms 98 5. 5.2 ... 71 4 .5 Conclusions 80 References 81 CHAPTER 5 Mechanical Transduction Techniques 85 5.1 Piezoresistivity 85 5.2 Piezoelectricity 89 5. 3 Capacitive Techniques 92 5. 4 Opti...
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MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... 2.9–3.1 Refractive index 1. 85 2 .5 2.01 Dielectric constant 6–9 6–7 Dielectric strength (10 6 Vcm −1 )5 10 Resistivity (Ω-cm) 10 6 –10 15 10 16 Energy gap (eV) 4 5 5 Si/N ratio 0.8–1.2 0. 75 hydrogen ions, ... is along the z-axis [1], most crystalline quartz is cut with the z-axis perpendicular to the plane of the wafer. The property of quartz that makes it useful in MEMS mechanica...
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MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... 3.14 MEMS Pro Complete Suite. (ROM) MEMS Modeler Multiphysics ANSYS Foundry CIF/GDSII Modeler Solid Analytical equations VHDL- AMS L-Edit Pro CIF MEMS Master MEMS Figure 3. 15 MEMS Master and MEMS ... was determined. 3.2.2.4 MEMS Pro /MEMS Xplorer (MEMScAP) MEMS Pro and MEMS Xplorer are PC and Unix-based CAD tools, respectively, and are supplied through MEMSCAP. The MEMS...
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MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... Instrum., Vol. 18, 19 85, pp. 103–1 15. [5] Greenwood, J. C., “Silicon in Mechanical Sensors, ” J. Phys. E: Sci. Instrum., Vol. 21, 1988, pp. 1114–1128. [6] Stemme, G., “ Resonant Silicon Sensors, ” J. Micromech. ... in more detail particular aspects relating to MEMS pressure sensors. This review of traditional diaphragm theory is particularly relevant in the packaging of MEMS tec...
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MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... Proc. 8th Int. Conf. on Solid State Sensors and Actuators (Transduc - ers ’ 95) and Eurosensors IX, Stockholm, Sweden, June 25 29, 19 95, pp. 58 6 58 9. [ 85] Beeby S. P., et al., “Micromachined Silicon ... Digest 19 85 Int. Conf. on Solid State Sensors and Actuators (Transducers ’ 85) , June 11–14, 19 85, Philadelphia, PA, pp. 186–188. [55 ] Catling, D. C., “High-Sensitivity Sil...
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MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... piezoresistive force sensor are used. A 6- m-thick, 25 0- m-wide silicon beam finger has a 30 0- m stroke and time constant of 11 ms. Gripping force is about 250 µN, and this is sensed by diffused ... of a Novel Integrated Floating-Electrode- ‘Electret’-Microphone (FEEM),” Proc. 11th IEEE Intl. Workshop on MEMS, Heidelberg, Germany, June 25 29, 1998, pp. 58 6 59 0. [114] Li, X., et a...
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MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... Conf. Micro Electro Mechanical Systems, Orlando, FL, January 17–21, 1999, pp. 55 8 56 3. [54 ] Enikov, E. T., and B. J. Nelson, “Three-Dimensional Microfabrication for a Multi-Degree- of-Freedom Capacitive ... J. Vehicle Design, Vol. 15, No. 3 5, 1994, pp. 243– 254 . [37] Zabler, E., et al., “A Non-Contact Strain-Gage Torque Sensor for Automotive Servo-Driven Steering Systems,” Sensors...
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MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... Actuators, Vol. A 25 27, 1991, pp. 55 5 55 8. [21] Seidel, H., et al., “Capacitive Silicon Accelerometer with Highly Symmetrical Design,” Sen - sors and Actuators, Vol. A21–23, 1990, pp. 312–3 15. [22] McDonald, ... axis (1.5G, 5G, 50 G, 100G) Dual axis (2G, 10G, 50 G) Analog output; bandwidth dc to 10 kHz; noise floor from 150 µG/√Hz (1.5G) to 4 mG/√Hz (100G); resolution from 1 mG (1...
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MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... (After: [44, 45] .) (c) The hot wire is made of 100-nm-thick and 5 0- m-long chrome/nickel, suspended above the wafer plane by two 0.4-mm- long beams. (After: [ 65] .) (d) A gold or platinum thin-film is ... to stand free into the flow [55 ], are placed on very thin membranes [41, 42, 50 , 51 , 53 , 54 , 56 ], or on bridges crossing the flow path [43, 48, 49]. Often a thin-film of si...
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