MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... packaged
MEMS mechanical sensor. Finally, Section 4. 4 .4 discusses the latest developments
and looks towards future packaging trends.
4. 4.1 Protection of the Sensor from Environmental Effects
MEMS mechanical ... pressure was
determined.
3.2.2 .4 MEMS Pro /MEMS Xplorer (MEMScAP)
MEMS Pro and MEMS Xplorer are PC and Unix-based CAD tools, respectively,
and are supplied throu...
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... 63
4. 3.3 Sealing Techniques 65
4. 4 MEMS Mechanical Sensor Packaging 66
4. 4.1 Protection of the Sensor from Environmental Effects 67
4. 4.2 Protecting the Environment from the Sensor 71
4. 4.3 Mechanical ... Pressure Sensors 132
6.5.3 Capacitive Pressure Sensors 137
6.5 .4 Resonant Pressure Sensors 139
6.5.5 Other MEMS Pressure Sensing Techniques 142
6.6 Microphones 143...
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... compressive
Dielectric strength
(10
6
Vcm
–1
)
3–6 3–6 8 10 10
Dielectric constant 4. 9 — 4. 3 4. 0 —
Refractive index 1 .45 1 .44 1 .44 1 .46 1 .46
Density (gcm
–3
) 2.3 1–2 2.1 2.2 2.2
Vertically etched
step in deposited
layer
Deposition ... 2 .4 Properties of CVD Silicon Dioxide
PECVD APCVD LPCVD LPCVD LPCVD
Process gases used SiH
4
+O
2
(or
N
2
O)
SiH
4
+O
2
SiH
4
+O
2
TEOS+O
2...
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Table 4. 5
GaAs 5.7
Lead frames Copper 17
Alloy 42 4. 3–6
Kovar 4. 9
Invar 1.5
Substrates/constraints Alumina (99%) 6.7
AIN 4. 1
Beryllia (99.5%) 6.7
Pyrex 7 740 3.3
Adhesives Au-Si eutectic 14. 2
Pb-Sn ... RTV silicone.
4. 4.3.5 Summary of Techniques for Mechanically Isolating the Sensor Chip
Table 4. 6 presents a summary of techniques for mechanically isolating the sensor
chip.
4. 4...
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... A., K. J. Gabriel, and M. Mehregany, “Thin-Film Processing of TiNi Shape Mem
-
ory Alloy,” Sensors and Actuators, Vol. A21–23, 1990, pp. 243 – 246 .
[ 14] Judy, J. W., R. S. Muller, and H. H. Zappe, ... B
p
is the stiff-
ness coefficient of the nonlinear term given by (6.28).
()
()P
Eh
Aa
yB
Eh
a
y
p
p
=+
3
4
3
4
3
(6.26)
()
A
b
a
b
a
a
b
p
=
−
−−
31
16
14
2
4
4...
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... Vol. ED-29, No. 1,
January 1982, pp. 42 48 .
[50] Pons, P., and G. Blasquez, “Low-Cost High Sensitivity Integrated Pressure and Tempera
-
ture Sensor,” Sensors and Actuators, Vol. A41 42 , 19 94, pp. ... pp. 240 – 245 .
[41 ] Folkmer, B., P. Steiner, and W. Lang, “A Pressure Sensor Based on a Nitride Membrane
Using Single-Crystalline Piezoresistors,” Sensors and Actuators, Vol. A 54...
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... capacitive
force sensor using optical fiber-to-chip coupling has been reported [ 54] . The sensor
has been designed to operate in the 0- to 50 0- N force range and the 0- to 1 0- Nm
torque range. The intended ... Membranes,” Sensors and Actuators, Vol. A100, 2002, pp.
301–309.
[108] Yoo, K., et al., “Fabrication of Biomimetic 3-D Structured Diaphragms,” Sensors and
Actuators, Vo...
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... 243 –2 54.
[37] Zabler, E., et al., “A Non-Contact Strain-Gage Torque Sensor for Automotive Servo-Driven
Steering Systems,” Sensors and Actuators, Vol. A41, No. 1–3, 19 94, pp. 39 46 .
[38] Fleming, W. J., “Automotive ... 44 5.
[46 ] Hatamura, Y., T. Nagao, and Y. Watanabe, “Development of a Tool-Holder Type Torque
Sensor,” Proc. 5th Intl. Conf. on Production Engineering, Tokyo, Japan, J...
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... 207
C
2B
C
3B
C
4B
C
2T
C
1T
C
2B
C
3B
C
C
2T
C
1T
∆V
4
4
s+s
p
V
fb
4
4
4
Digital
output
Signal
pick-off
Compensator
4B
C
2T
C
1T
Levitated Disk
C
3T
C
2T
T
s
44
4
4
C
4T
C
1T
C
3B
C
2B
C
1B
C
4B
∆C
s+s
0
V
fb
z
y
x
φ
θ
Figure ... 79–87.
[4] Starr, J. B., “Squeeze-Film Damping in Solid-State Accelerometers,” IEEE Solid-State Sen
-
sor and Actuator Workshop, Hilton Head, SC, 199...
MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... (After: [44 , 45 ].) (c) The hot wire is made of
100-nm-thick and 5 0- m-long chrome/nickel, suspended above the wafer plane by two 0 . 4- mm-
long beams. (After: [65].) (d) A gold or platinum thin-film ... and thus to flow rate. Platinum [17, 29, 42 ], gold [43 ],
polysilicon [44 , 45 ], Ni-ZrO
2
cermet films [46 ], amorphous germanium [47 , 48 ],
9.2 Thermal Flow Sensors 217
(c)
T
s...
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