MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
MEMS Mechanical Sensors - Stephen Beeby Part 2 doc
... Techniques
Table 2. 4 Properties of CVD Silicon Dioxide
PECVD APCVD LPCVD LPCVD LPCVD
Process gases used SiH
4
+O
2
(or
N
2
O)
SiH
4
+O
2
SiH
4
+O
2
TEOS+O
2
SiCl
2
H
2
+N
2
O
Deposition temp. (°C) 25 0 400 ... 1.44 1.44 1.46 1.46
Density (gcm
–3
) 2. 3 1 2 2.1 2. 2 2. 2
Vertically etched
step in deposited
layer
Deposition of
PSG or BPSG
Reflow at high
temperature
Figure...
MEMS Mechanical Sensors - Stephen Beeby Part 5 docx
... Modulus
(10
9
N/m
2
)
Eutectic AuSi (97/3) 400 27 .2 87
Solder Pb/Sn 20 0 35 14
Glass Pb glass 450–800 0 .25 2 60
Anodic Pyrex/ Borofloat 33 25 0–500 1.09 63
Epoxy Epoxy (Ag loaded) 150 1 .2 0 .2 27
Thermoplastic ... Ultrasonics Symposium, October
22 25 , 20 00, San Juan, PR, Vol. 2, pp. 1179–11 82.
[24 ] Chow, E. M., et al., “Process Compatible Polysilicon-Based Electrical Thro...
MEMS Mechanical Sensors - Stephen Beeby Part 8 doc
... ()
()RT R T T=++01
2
αβ
(6.38)
() () ()
() ()
[]
()()
[]
() ()
() ()
[]
∆VT
V
RR
RR
TT
RR
RR
A
0 12
12
2
12 12
2
12
12
2
00
00
00
00
=
+
×− +−
−
αα ββ
()()
[]
×− +−αα ββ
12
12
2
TT
(6.39)
The incorporation ... “Micromachined Sensors for Automotive Applications,” Proc. of
IEEE Sensors 20 02, 1st Int. Conf. on Sensors, Vol. 2, Orlando, FL, June 12 14, 20 02, pp.
1561–1564....
MEMS Mechanical Sensors - Stephen Beeby Part 1 potx
... of
pressure).
MEMS Mechanical Sensors
6 .2. 3 Pressure Sensor Types 121
6.3 Traditional Pressure Sensors 121
6.3.1 Manometer 121
6.3 .2 Aneroid Barometers 122
6.3.3 Bourdon Tube 122
6.3.4 Vacuum Sensors 123
6.4 ... Devices 22 5
9.3 Pressure Difference Flow Sensors 22 9
9.4 Force Transfer Flow Sensors 23 2
9.4.1 Drag Force 23 2
9.4 .2 Lift Force 23 5
9.4.3 Coriolis F...
MEMS Mechanical Sensors - Stephen Beeby Part 4 pdf
... results
Figure 3.10 Typical ANSYS routine.
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
Thick-film ... pressure was
determined.
3 .2. 2.4 MEMS Pro /...
MEMS Mechanical Sensors - Stephen Beeby Part 7 pot
... ’93, 1993, pp. 27 2 27 7.
[13] Walker,J. A., K. J. Gabriel, and M. Mehregany, “Thin-Film Processing of TiNi Shape Mem
-
ory Alloy,” Sensors and Actuators, Vol. A21 23 , 1990, pp. 24 3 24 6.
[14] Judy, ... strain in order to
6.4 Diaphragm-Based Pressure Sensors 129
()
σν
r
Pa
h
r
a
=± + −
3
8
31
2
2
2
2
(6.17)
()
σ
ν
r
Pa
h
max
=±
+
3
8
3
2
2
(6.18)...
MEMS Mechanical Sensors - Stephen Beeby Part 9 pot
... Gianchandani, “A Servo-Controlled Capacitive Pressure Sensor Using
a Capped-Cylinder Structure Microfabricated by a Three-Mask Process,” J. MEMS, Vol.
12, No. 2, April 20 03, pp. 20 9 22 0.
[106] Scheeper, ... Microphones,” Microe-
lectronics Journal, Vol. 33, 20 02, pp. 21 28 .
[110] Kronast, W., et al., “Single-Chip Condenser Microphone Using Porous Silicon as a Sacrifi-
cial Layer f...
MEMS Mechanical Sensors - Stephen Beeby Part 10 pptx
... Torque Sensors for Electromechani
-
cal Power Steering Applications,” Proc. Intl. Congress on Electronic Systems for Vehicles,
Baden Baden, Germany, September 27 28 , 20 01, pp. 20 2 21 2.
[ 32] Londsdale, ... al., “Non-Contact Torque Sensors Based on SAW Arrays,” Proc. IEEE Int.
Frequency Control Symp., New Orleans, LA, May 29 –31, 20 02, pp. 20 2 21 3.
[31] Jerems, F., et al.,...
MEMS Mechanical Sensors - Stephen Beeby Part 11 pps
... signal about the out-of-plane axis (z-axis)
excites a secondary motion along the other in-plane axis (y-axis). The sensing ele-
ment is shown in Figure 8 .24 and consists of a 2- m-thick polysilicon ... Dig. Solid-State Sensors and Actuators Workshop, 19 92,
Hilton Head, SC, pp. 122 – 125 .
[14] Allen, H. V., S. C. Terry, and D. W. DeBruin, “Accelerometer Systems with Self-Testable
Featu...
MEMS Mechanical Sensors - Stephen Beeby Part 12 potx
... 2 ms Liquids and
gases
—
Glaninger et al.
[50]; 20 00
0.01 20 0 m/s;
0.6 ml/h to 150
l/h
— 20 ms Air 2 × 4 × 0.3
mm
3
Oda et al. [53];
20 02
< 12, 000 l/h — — Air 2 × 2mm
2
Ernst et al. [47];
20 02
>100 ... × 2mm
2
Ernst et al. [47];
20 02
>100 nl/h — — Water —
Makinwa et al.
[28 ]; 20 02
2–18 m/s — — Air 4 × 4mm
2
Park et al. [29 ];
20 03
5–10 m/s — — Air 6 ....
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