MEMS Mechanical Sensors - Stephen Beeby Part 2 doc

... Techniques Table 2. 4 Properties of CVD Silicon Dioxide PECVD APCVD LPCVD LPCVD LPCVD Process gases used SiH 4 +O 2 (or N 2 O) SiH 4 +O 2 SiH 4 +O 2 TEOS+O 2 SiCl 2 H 2 +N 2 O Deposition temp. (°C) 25 0 400 ... 1.44 1.44 1.46 1.46 Density (gcm –3 ) 2. 3 1 2 2.1 2. 2 2. 2 Vertically etched step in deposited layer Deposition of PSG or BPSG Reflow at high temperature Figure...

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... Modulus (10 9 N/m 2 ) Eutectic AuSi (97/3) 400 27 .2 87 Solder Pb/Sn 20 0 35 14 Glass Pb glass 450–800 0 .25 2 60 Anodic Pyrex/ Borofloat 33 25 0–500 1.09 63 Epoxy Epoxy (Ag loaded) 150 1 .2 0 .2 27 Thermoplastic ... Ultrasonics Symposium, October 22 25 , 20 00, San Juan, PR, Vol. 2, pp. 1179–11 82. [24 ] Chow, E. M., et al., “Process Compatible Polysilicon-Based Electrical Thro...

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... () ()RT R T T=++01 2 αβ (6.38) () () () () () [] ()() [] () () () () [] ∆VT V RR RR TT RR RR A 0 12 12 2 12 12 2 12 12 2 00 00 00 00 = + ×− +− − αα ββ ()() [] ×− +−αα ββ 12 12 2 TT (6.39) The incorporation ... “Micromachined Sensors for Automotive Applications,” Proc. of IEEE Sensors 20 02, 1st Int. Conf. on Sensors, Vol. 2, Orlando, FL, June 12 14, 20 02, pp. 1561–1564....

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... of pressure). MEMS Mechanical Sensors 6 .2. 3 Pressure Sensor Types 121 6.3 Traditional Pressure Sensors 121 6.3.1 Manometer 121 6.3 .2 Aneroid Barometers 122 6.3.3 Bourdon Tube 122 6.3.4 Vacuum Sensors 123 6.4 ... Devices 22 5 9.3 Pressure Difference Flow Sensors 22 9 9.4 Force Transfer Flow Sensors 23 2 9.4.1 Drag Force 23 2 9.4 .2 Lift Force 23 5 9.4.3 Coriolis F...

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... results Figure 3.10 Typical ANSYS routine. 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Thick-film ... pressure was determined. 3 .2. 2.4 MEMS Pro /...

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... ’93, 1993, pp. 27 2 27 7. [13] Walker,J. A., K. J. Gabriel, and M. Mehregany, “Thin-Film Processing of TiNi Shape Mem - ory Alloy,” Sensors and Actuators, Vol. A21 23 , 1990, pp. 24 3 24 6. [14] Judy, ... strain in order to 6.4 Diaphragm-Based Pressure Sensors 129 () σν r Pa h r a =± + −               3 8 31 2 2 2 2 (6.17) () σ ν r Pa h max =± + 3 8 3 2 2 (6.18)...

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... Gianchandani, “A Servo-Controlled Capacitive Pressure Sensor Using a Capped-Cylinder Structure Microfabricated by a Three-Mask Process,” J. MEMS, Vol. 12, No. 2, April 20 03, pp. 20 9 22 0. [106] Scheeper, ... Microphones,” Microe- lectronics Journal, Vol. 33, 20 02, pp. 21 28 . [110] Kronast, W., et al., “Single-Chip Condenser Microphone Using Porous Silicon as a Sacrifi- cial Layer f...

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... Torque Sensors for Electromechani - cal Power Steering Applications,” Proc. Intl. Congress on Electronic Systems for Vehicles, Baden Baden, Germany, September 27 28 , 20 01, pp. 20 2 21 2. [ 32] Londsdale, ... al., “Non-Contact Torque Sensors Based on SAW Arrays,” Proc. IEEE Int. Frequency Control Symp., New Orleans, LA, May 29 –31, 20 02, pp. 20 2 21 3. [31] Jerems, F., et al.,...

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... signal about the out-of-plane axis (z-axis) excites a secondary motion along the other in-plane axis (y-axis). The sensing ele- ment is shown in Figure 8 .24 and consists of a 2- m-thick polysilicon ... Dig. Solid-State Sensors and Actuators Workshop, 19 92, Hilton Head, SC, pp. 122 – 125 . [14] Allen, H. V., S. C. Terry, and D. W. DeBruin, “Accelerometer Systems with Self-Testable Featu...

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... 2 ms Liquids and gases — Glaninger et al. [50]; 20 00 0.01 20 0 m/s; 0.6 ml/h to 150 l/h — 20 ms Air 2 × 4 × 0.3 mm 3 Oda et al. [53]; 20 02 < 12, 000 l/h — — Air 2 × 2mm 2 Ernst et al. [47]; 20 02 >100 ... × 2mm 2 Ernst et al. [47]; 20 02 >100 nl/h — — Water — Makinwa et al. [28 ]; 20 02 2–18 m/s — — Air 4 × 4mm 2 Park et al. [29 ]; 20 03 5–10 m/s — — Air 6 ....

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