MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 15 docx
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 15 docx
... health and safety. Both critical and
Osiander / MEMS and microstructures in Aerospace applications DK3181_c016 Final Proof page 360 1.9.2005 12:56pm
360 MEMS and Microstructures in Aerospace Applications
© ... vehicle interfaces and drivers
Osiander / MEMS and microstructures in Aerospace applications DK3181_c016 Final Proof page 358 1.9.2005 12:5...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 5 docx
... certain devices, such as
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 96 25.8.2005 3:39pm
96 MEMS and Microstructures in Aerospace Applications
© 2006 ... Course, IEEE, 1992.)
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 98 25.8.2005 3:39pm
98 MEMS and Micro...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 1 pptx
... trademarks, and are used only
for identification and explanation without intent to infringe.
Library of Congress Cataloging -in- Publication Data
Osiander, Robert.
MEMS and microstructures in aerospace applications ... of
Microelectromechanical
Systems and
Microstructures in
Aerospace Applications
Robert Osiander and M. Ann Garrison Darrin
CONTENTS
1.1 Introd...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 2 pot
... Directional etching of crystalline silicon.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9.2005 8:59pm
42 MEMS and Microstructures in Aerospace Applications
features ... microbolometers for infrared spectrometry, and entire labora-
tory-on-a-chip device concepts. One can also envision MEMS- based environmental
an...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 3 ppsx
... micromachining etches with techniques such as etch stops and
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm
62 MEMS and Microstructures in ... functional
material for MEMS applications, Journal of Micromechanical Microengineering, 12,
pp. 368–374, 2002.
Osiander / MEMS and microstructures in A...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 4 ppt
... effects, and dendrite growth. Internal moisture-related failure
Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 72 25.8.2005 3:40pm
72 MEMS and Microstructures ... August 1991. ESA SP-320.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 82 25.8.2005 3:40pm
82 MEMS and...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 7 ppt
... Center and from Mihailovich, R. E., et al. )
Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 152 1.9.2005 12:05pm
152 MEMS and Microstructures in Aerospace ... shift between the input and output.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 160 1.9.2005 12:05...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 8 doc
... selecting surface materials, spacecraft thermal
Osiander / MEMS and microstructures in Aerospace applications DK3181_c009 Final Proof page 190 1.9.2005 12:07pm
190 MEMS and Microstructures in Aerospace ... transmission-line
phasie shifters — U-band and W-band designs, IEEE Transactions on Microwave
Theory and Techniques, 48 (11), 1957, 2000.
Osiander / MEMS an...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 10 pot
... S. et al. , Integrated sensor and electronics processing for > 108 ‘‘iMEMS’’
inertial measurement unit components, technical digest — International Electron De-
vices Meeting 949, 2003.
Osiander ... Conference
Proceedings 3, 3156 5, 2001.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c010 Final Proof page 226 1.9.2005 12:13pm
226 MEMS and Mi...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 12 pot
... silver filled epoxy resin.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 276 1.9.2005 9:13pm
276 MEMS and Microstructures in Aerospace Applications
© 2006 ... systems
Micrometeoroid and debris
impingement, material erosion,
redistribution, shedding, flaking,
operational events
Osiander / MEMS and microstructures...