MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 14 pot
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 14 pot
... CRC Press.
pp. 373.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c 014 Final Proof page 326 1.9.2005 12:47pm
326 MEMS and Microstructures in Aerospace Applications
© 2006 ... (various
pagings).
6. Falvo, M.R. and R. Superfine, Mechanics and friction at the nanometer scale. Journal of
Nanoparticle Research, 2000. 2(3): p. 237–248.
Osiande...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 2 pot
... Directional etching of crystalline silicon.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9.2005 8:59pm
42 MEMS and Microstructures in Aerospace Applications
features ... microbolometers for infrared spectrometry, and entire labora-
tory-on-a-chip device concepts. One can also envision MEMS- based environmental
an...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 10 pot
... S. et al. , Integrated sensor and electronics processing for > 108 ‘‘iMEMS’’
inertial measurement unit components, technical digest — International Electron De-
vices Meeting 949, 2003.
Osiander ... Conference
Proceedings 3, 31565, 2001.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c010 Final Proof page 226 1.9.2005 12:13pm
226 MEMS and Mic...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 12 pot
... with potential particulates from integration and
Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 281 1.9.2005 9:13pm
MEMS Packaging for Space Applications ... systems
Micrometeoroid and debris
impingement, material erosion,
redistribution, shedding, flaking,
operational events
Osiander / MEMS and microstructures in Ae...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 13 pot
... mission lifetime and degrade data
quality. These degradations may include long-term changes in the optical surfaces
Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof ... Placing a protective window over the
Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof page 303 1.9.2005 12:45pm
Handling...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 1 pptx
... trademarks, and are used only
for identification and explanation without intent to infringe.
Library of Congress Cataloging -in- Publication Data
Osiander, Robert.
MEMS and microstructures in aerospace applications ... of
Microelectromechanical
Systems and
Microstructures in
Aerospace Applications
Robert Osiander and M. Ann Garrison Darrin
CONTENTS
1.1 Introd...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 3 ppsx
... micromachining etches with techniques such as etch stops and
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm
62 MEMS and Microstructures in ... functional
material for MEMS applications, Journal of Micromechanical Microengineering, 12,
pp. 368–374, 2002.
Osiander / MEMS and microstructures in A...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 4 ppt
... effects, and dendrite growth. Internal moisture-related failure
Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 72 25.8.2005 3:40pm
72 MEMS and Microstructures ... August 1991. ESA SP-320.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 82 25.8.2005 3:40pm
82 MEMS and...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 5 docx
... MEMS Optical Mirrors, IEEE, 2003.)
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 106 25.8.2005 3:39pm
106 MEMS and Microstructures in Aerospace Applications
© ... certain devices, such as
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 96 25.8.2005 3:39pm
96 MEMS...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 7 ppt
... shift between the input and output.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 160 1.9.2005 12:05pm
160 MEMS and Microstructures in Aerospace Applications
© ... Center and from Mihailovich, R. E., et al. )
Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 152...
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