MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 13 pot

... mission lifetime and degrade data quality. These degradations may include long-term changes in the optical surfaces Osiander / MEMS and microstructures in Aerospace applications DK3181_c 013 Final Proof ... Placing a protective window over the Osiander / MEMS and microstructures in Aerospace applications DK3181_c 013 Final Proof page 303 1.9.2005 12:45pm Hand...

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... Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9.2005 8:59pm 42 MEMS and Microstructures in Aerospace Applications features ... microbolometers for infrared spectrometry, and entire labora- tory-on-a-chip device concepts. One can also envision MEMS- based environmental an...

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... Conference Proceedings 3, 31565, 2001. Osiander / MEMS and microstructures in Aerospace applications DK3181_c010 Final Proof page 226 1.9.2005 12:13pm 226 MEMS and Microstructures in Aerospace Applications © 2006 ... S. et al. , Integrated sensor and electronics processing for > 108 ‘‘iMEMS’’ inertial measurement unit components, technical digest — Internatio...

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... with potential particulates from integration and Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 281 1.9.2005 9:13pm MEMS Packaging for Space Applications ... during Die Singulation, Release, and Packaging 291 13. 3.1 Die Singulation 291 13. 3.2 Handling during Release 291 13. 3.3 Packaging 292 13. 4 In- Process Handling a...

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... of sand and dust. Osiander / MEMS and microstructures in Aerospace applications DK3181_c015 Final Proof page 338 1.9.2005 12:52pm 338 MEMS and Microstructures in Aerospace Applications © 2006 ... J.F. and W. Alexander, CRC Materials Science and Engineering Hand- book. 3rd ed. 2001. Boca Raton, FL: CRC Press. 1949 p. 5. Sharpe Jr., W.N., The MEMS handbook. In...

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... trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging -in- Publication Data Osiander, Robert. MEMS and microstructures in aerospace applications ... of Microelectromechanical Systems and Microstructures in Aerospace Applications Robert Osiander and M. Ann Garrison Darrin CONTENTS 1.1 Introd...

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... micromachining etches with techniques such as etch stops and Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm 62 MEMS and Microstructures in ... functional material for MEMS applications, Journal of Micromechanical Microengineering, 12, pp. 368–374, 2002. Osiander / MEMS and microstructures in A...

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... effects, and dendrite growth. Internal moisture-related failure Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 72 25.8.2005 3:40pm 72 MEMS and Microstructures ... August 1991. ESA SP-320. Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 82 25.8.2005 3:40pm 82 MEMS and...

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... certain devices, such as Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 96 25.8.2005 3:39pm 96 MEMS and Microstructures in Aerospace Applications © 2006 ... Course, IEEE, 1992.) Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 98 25.8.2005 3:39pm 98 MEMS and Micro...

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... shift between the input and output. Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 160 1.9.2005 12:05pm 160 MEMS and Microstructures in Aerospace Applications © ... Center and from Mihailovich, R. E., et al. ) Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 152...

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