... micromachining etches with techniques such as etch stops and Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm62 MEMS and Microstructures in ... functionalmaterial for MEMS applications, Journal of Micromechanical Microengineering, 12,pp. 368–374, 2002. Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof ... polycrystalline silicon surfacemicromachining, and Fan et al. 19illustrated an array of mechanical elements suchas fixed-axle pin joints, self-constraining pin joints, and sliding elements. Pisteret...