MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 4 ppt

... effects, and dendrite growth. Internal moisture-related failure Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 04 Final Proof page 72 25.8.2005 3 :40 pm 72 MEMS and Microstructures ... August 1991. ESA SP-320. Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 04 Final Proof page 82 25.8.2005 3 :40 pm 82 MEMS...

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... trademarks, and are used only for identification and explanation without intent to infringe. Library of Congress Cataloging -in- Publication Data Osiander, Robert. MEMS and microstructures in aerospace applications ... 6 1.3.6 OPAL, SAPPHIRE, and Emerald 6 1.3.7 International Examples 6 1 .4 Microelectromechanical Systems and Microstructures in Aerospace Applicat...

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... spectrometer (irmos), Proceedings of SPIE 40 92 , 102, 2000. Osiander / MEMS and microstructures in Aerospace applications DK3181_c007 Final Proof page 144 1.9.2005 12:04pm 144 MEMS and Microstructures ... Kistenmacher, T.J. et al. , Design and properties of a thin-film, MEMS- based magneto- strictive magnetometer, Materials Research Society Symposium — Proceedings...

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... 3 .4 Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9.2005 8:59pm 42 MEMS and Microstructures in Aerospace ... J. Allen CONTENTS 3.1 Introduction 35 3.2 MEMS Fabrication Technologies 36 3.3 LIGA 38 3 .4 Bulk Micromachining 40 3 .4. 1 Wet Etching 41 3 .4. 2 Plasma Etch...

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... micromachining etches with techniques such as etch stops and Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm 62 MEMS and Microstructures in ... structures for 3-D culturing of neurons, 2003 ASME International Mechanical Engineering Congress, IMECE2003 42 7 94. Osiander / MEMS and microstructures in...

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... Microengines, IEEE, 1998.) Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 1 04 25.8.2005 3:39pm 1 04 MEMS and Microstructures in Aerospace Applications © 2006 ... MEMS Optical Mirrors, IEEE, 2003.) Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 106 25.8.2005 3:39...

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... Kim, M. et al. , A DC-to -4 0 GHz four-bit RF MEMS true-time delay network, IEEE Microwave Wireless Component Letters, 11 (2), 56, 2001. 48 . Tan, G L. et al. , Low-loss 2- and 4- bit TTD MEMS phase ... selecting surface materials, spacecraft thermal Osiander / MEMS and microstructures in Aerospace applications DK3181_c009 Final Proof page 190 1.9.2005 12:07pm 1...

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... mass 100 N sec/500 g Osiander / MEMS and microstructures in Aerospace applications DK3181_c011 Final Proof page 240 1.9.2005 12:31pm 240 MEMS and Microstructures in Aerospace Applications © 2006 ... Micromechanics and Microengineering Papers from the 14th Micro- mecahnics Europe Workshop (MM‘03) 14 (9), 82, 20 04. Osiander / MEMS and microstructures in...

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... pads and metal pads on the package substrate. Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 278 1.9.2005 9:13pm 278 MEMS and Microstructures in Aerospace ... available devices. 2 Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 2 74 1.9.2005 9:13pm 2 74 MEMS and...

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... Electronics Engineers, Inc., pp. 1020–10 24 (2002). Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof page 307 1.9.2005 12 :45 pm Handling and Contamination Control for Critical ... Metals 320 14. 6.6 Polycrystalline Diamond 320 14. 6.7 Silicon Carbide 321 14. 6.8 Polymers and Epoxies 321 14. 6.9 SU-8 321 14. 6.10 CP1 1 322 14. 7 C...

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