MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 4 ppt
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 4 ppt
... effects, and dendrite growth. Internal moisture-related failure
Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 04 Final Proof page 72 25.8.2005 3 :40 pm
72 MEMS and Microstructures ... August 1991. ESA SP-320.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 04 Final Proof page 82 25.8.2005 3 :40 pm
82 MEMS...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 1 pptx
... trademarks, and are used only
for identification and explanation without intent to infringe.
Library of Congress Cataloging -in- Publication Data
Osiander, Robert.
MEMS and microstructures in aerospace applications ... 6
1.3.6 OPAL, SAPPHIRE, and Emerald 6
1.3.7 International Examples 6
1 .4 Microelectromechanical Systems and Microstructures
in Aerospace Applicat...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 7 ppt
... spectrometer (irmos),
Proceedings of SPIE 40 92
, 102, 2000.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c007 Final Proof page 144 1.9.2005 12:04pm
144 MEMS and Microstructures ... Kistenmacher, T.J. et al. , Design and properties of a thin-film, MEMS- based magneto-
strictive magnetometer, Materials Research Society Symposium — Proceedings...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 2 pot
... 3 .4 Directional etching of crystalline silicon.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9.2005 8:59pm
42 MEMS and Microstructures in Aerospace ... J. Allen
CONTENTS
3.1 Introduction 35
3.2 MEMS Fabrication Technologies 36
3.3 LIGA 38
3 .4 Bulk Micromachining 40
3 .4. 1 Wet Etching 41
3 .4. 2 Plasma Etch...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 3 ppsx
... micromachining etches with techniques such as etch stops and
Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9.2005 9:00pm
62 MEMS and Microstructures in ... structures for 3-D culturing of neurons, 2003
ASME International Mechanical Engineering Congress, IMECE2003 42 7 94.
Osiander / MEMS and microstructures in...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 5 docx
... Microengines, IEEE, 1998.)
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 1 04 25.8.2005 3:39pm
1 04 MEMS and Microstructures in Aerospace Applications
© 2006 ... MEMS Optical Mirrors, IEEE, 2003.)
Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 106 25.8.2005 3:39...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 8 doc
... Kim, M. et al. , A DC-to -4 0 GHz four-bit RF MEMS true-time delay network, IEEE
Microwave Wireless Component Letters, 11 (2), 56, 2001.
48 . Tan, G L. et al. , Low-loss 2- and 4- bit TTD MEMS phase ... selecting surface materials, spacecraft thermal
Osiander / MEMS and microstructures in Aerospace applications DK3181_c009 Final Proof page 190 1.9.2005 12:07pm
1...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 10 pot
... mass 100 N sec/500 g
Osiander / MEMS and microstructures in Aerospace applications DK3181_c011 Final Proof page 240 1.9.2005 12:31pm
240 MEMS and Microstructures in Aerospace Applications
© 2006 ... Micromechanics and Microengineering Papers from the 14th Micro-
mecahnics Europe Workshop (MM‘03) 14 (9), 82, 20 04.
Osiander / MEMS and microstructures in...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 12 pot
... pads and metal pads on the package substrate.
Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 278 1.9.2005 9:13pm
278 MEMS and Microstructures in Aerospace ... available devices.
2
Osiander / MEMS and microstructures in Aerospace applications DK3181_c012 Final Proof page 2 74 1.9.2005 9:13pm
2 74 MEMS and...
MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 13 pot
... Electronics
Engineers, Inc., pp. 1020–10 24 (2002).
Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof page 307 1.9.2005 12 :45 pm
Handling and Contamination Control for Critical ... Metals 320
14. 6.6 Polycrystalline Diamond 320
14. 6.7 Silicon Carbide 321
14. 6.8 Polymers and Epoxies 321
14. 6.9 SU-8 321
14. 6.10 CP1
1
322
14. 7 C...
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