MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 2 pot

... 54.7Њ <111> <100> SiO 2 Mask φ FIGURE 3.4 Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 42 1.9 .20 05 8:59pm 42 MEMS and Microstructures ... electromagnetic or Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 02 Final Proof page 2...

Ngày tải lên: 10/08/2014, 05:20

... 31565, 20 01. Osiander / MEMS and microstructures in Aerospace applications DK3181_c010 Final Proof page 22 6 1.9 .20 05 12: 13pm 22 6 MEMS and Microstructures in Aerospace Applications © 20 06 by Taylor ... mission duration. Osiander / MEMS and microstructures in Aerospace applications DK3181_c011 Final Proof page 23 2 1.9 .20 05 12: 31pm 23 2 M...

Ngày tải lên: 10/08/2014, 05:20

... Introduction 28 9 13 .2 Wafer Handling 29 0 13.3 Handling during Die Singulation, Release, and Packaging 29 1 13.3.1 Die Singulation 29 1 13.3 .2 Handling during Release 29 1 13.3.3 Packaging 29 2 13.4 In- Process ... pads and metal pads on the package substrate. Osiander / MEMS and microstructures in Aerospace applications DK3181_c0 12 Final Proof page 27 8 1.9 ....

Ngày tải lên: 10/08/2014, 05:20

... Electronics Engineers, Inc., pp. 1 020 –1 024 (20 02) . Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof page 307 1.9 .20 05 12: 45pm Handling and Contamination Control for Critical ... pp. 29 6 29 9 (1993). Osiander / MEMS and microstructures in Aerospace applications DK3181_c013 Final Proof page 306 1.9 .20 05 12: 45pm 306...

Ngày tải lên: 10/08/2014, 05:20

... nanometer scale. Journal of Nanoparticle Research, 20 00. 2( 3): p. 23 7 24 8. Osiander / MEMS and microstructures in Aerospace applications DK3181_c014 Final Proof page 324 1.9 .20 05 12: 47pm 324 MEMS ... Testing and Failure Analysis, ISTFA 20 04, 9639, 20 04, 22 5 23 1. Osiander / MEMS and microstructures in Aerospace applications DK3181_c015 Final Pr...

Ngày tải lên: 10/08/2014, 05:20

... Missions 16 2. 2.1 NMP ST5 Thermal Louvers 16 2. 2 .2 JWST Microshutter Array 18 2. 2.3 Inchworm Microactuators 20 2. 2.4 NMP ST6 Inertial Stellar Camera 21 2. 2.5 Microthrusters 23 2. 2.6 Other Examples ... Sensors and Instrumentation 27 2. 3.4 Exploration Applications 28 2. 3.5 Space Particles or Morphing Entities 28 2. 4 Challenges and Future Needs 29 2. 4.1 Challen...

Ngày tải lên: 10/08/2014, 05:20

... micromachining etches with techniques such as etch stops and Osiander / MEMS and microstructures in Aerospace applications DK3181_c003 Final Proof page 62 1.9 .20 05 9:00pm 62 MEMS and Microstructures in ... functional material for MEMS applications, Journal of Micromechanical Microengineering, 12, pp. 368–374, 20 02. Osiander / MEMS and microstructures...

Ngày tải lên: 10/08/2014, 05:20

... effects, and dendrite growth. Internal moisture-related failure Osiander / MEMS and microstructures in Aerospace applications DK3181_c004 Final Proof page 72 25.8 .20 05 3:40pm 72 MEMS and Microstructures ... Proceedings of the European Space Conference, August 1991. ESA SP- 320 . Osiander / MEMS and microstructures in Aerospace applications DK3181_c004...

Ngày tải lên: 10/08/2014, 05:20

... (December 20 03). Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 108 25 .8 .20 05 3:39pm 108 MEMS and Microstructures in Aerospace Applications © 20 06 by ... Mirrors, IEEE, 20 03.) Osiander / MEMS and microstructures in Aerospace applications DK3181_c005 Final Proof page 106 25 .8 .20 05 3:39pm 106 MEMS...

Ngày tải lên: 10/08/2014, 05:20

... Center and from Mihailovich, R. E., et al. ) Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 1 52 1.9 .20 05 12: 05pm 1 52 MEMS and Microstructures in Aerospace ... shift between the input and output. Osiander / MEMS and microstructures in Aerospace applications DK3181_c008 Final Proof page 160 1.9 .20 0...

Ngày tải lên: 10/08/2014, 05:20