MEMS and Microstructures in Aerospace Applications - Robert Osiander et al (Eds) Part 1 pptx

... still in the Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c0 01 Final Proof page 1 1.9.2005 11 :41am 1 © 2006 by Taylor & Francis Group, LLC Preface MEMS and Microstructures ... Applications Robert Osiander and M. Ann Garrison Darrin CONTENTS 1. 1 Introduction 1 1.2 Implications of MEMS and Microsystems in Aerospace...

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... 54.7Њ < ;11 1> < ;10 0> SiO 2 Mask φ FIGURE 3.4 Directional etching of crystalline silicon. Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c003 Final Proof page 42 1. 9.2005 ... such as electromagnetic or Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c002 Final Proof page 28 1. 9.2005 11 :50am 28 MEMS...

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... /min Tetramethylammonium hydroxide (TMAH) {10 0} 1. 0 m/min {1 1 1} 0.029 m/min SiO 2 0.0002 m /min SiN 4 0.00 01 m /min Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c003 Final ... 2H 2 {1 0 0} 0 .14 m/min {1 1 1} 0.0035 m/min SiO 2 0.0 014 m /min SiN 4 not etched Ethylene diamine pyrocatechol (EDP) {1 0 0} 0.75 m/min {1 1 1} 0.0 21 m/min...

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... Sunspot Maximum: Cycle 20: 11 /19 68, Cycle 21: 11 /19 79, Cycle 22: 11 /19 89 (Ref. Feynman et al. 19 93) NASA/GSFC -1 9 96 10 7 10 8 Protons/cm 2 10 9 10 10 10 11 FIGURE 5 .1 Large solar proton events ... 10 ,000 Electromechanical assembly 10 0 Inertial instrument 10 0 Optical assembly 10 0 Spacecraft assembly and test 10 0 Osiander / MEMS and microstructure...

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... of MEMS Optical Mirrors, IEEE, 2003.) Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c005 Final Proof page 10 6 25.8.2005 3:39pm 10 6 MEMS and Microstructures in Aerospace Applications © ... MNT Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c006 Final Proof page 11 1 2.9.2005 9:38am 11 1 © 2006 by T...

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... shift between the input and output. Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c008 Final Proof page 16 0 1. 9.2005 12 :05pm 16 0 MEMS and Microstructures in Aerospace Applications © ... Center and from Mihailovich, R. E., et al. ) Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c008 Final Pr...

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... selecting surface materials, spacecraft thermal Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c009 Final Proof page 19 0 1. 9.2005 12 :07pm 19 0 MEMS and Microstructures in Aerospace ... (Courtesy: JHU/APL.) Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c009 Final Proof page 19 4 1. 9.2005 12 :07pm...

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... 80 10 0 FIGURE 11 .1 System dry mass as a function of mission duration. Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c 011 Final Proof page 232 1. 9.2005 12 :31pm 232 MEMS and ... ¼ M P v e Dt (11 :2) For an EP system the mass of the power supply is given by Equation (11 .3), Osiander / MEMS and microstructures in Aerospace applic...

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... potential particulates from integration and Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c 012 Final Proof page 2 81 1.9.2005 9 :13 pm MEMS Packaging for Space Applications 2 81 © ... during Die Singulation, Release, and Packaging 2 91 13.3 .1 Die Singulation 2 91 13.3.2 Handling during Release 2 91 13.3.3 Packaging 292 13 .4 In- Process...

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... Electronics Engineers, Inc., pp. 10 20 10 24 (2002). Osiander / MEMS and microstructures in Aerospace applications DK 318 1_c 013 Final Proof page 307 1. 9.2005 12 :45pm Handling and Contamination Control for Critical ... LLC 14 Material Selection for Applications of MEMS Keith Rebello CONTENTS 14 .1 Introduction 310 14 .2 Scaling Laws 310 14 .3 Material Selection...

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