Mechanics of Microelectromechanical Systems - N Lobontiu and E Garcia Part 4 doc
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 4 doc
... set of experimental
measurements, for instance the deflection at a point placed at a distance
from the free end, is needed. In this case, the deflection at the experimental
point of detection is:
Equations ... microcantilever to
the performance of a right elliptically-filleted one when and is the
friction force between the microcantilever tip and the investigated three-
dimensional...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 1 docx
... more generic case where the area is variable, to:
where it has been taken into account that the elementary volume can be
expressed in terms of the cross-sectional area A and the elementary length ... stiffnesses or compliances, namely: two direct (linear and rotary)
and one crossed, define the elastic response at the free end of a cantilever.
More details on the spring characterizat...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 3 doc
... indeterminate, the reactions
and need to be first determined, by using the corresponding
boundary conditions:
which can be expressed as:
The bending moment is:
The unknown reactions are:
The horizontal ... microbridges
67
in the oscillating mode – when the modal frequencies are actually monitored
and determined. They can operate in a contact mode or in a non-contact
mode (when a pre-desig...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 6 doc
... the springs. A serpentine spring is formed of one or several
series-connected units, as the one shown in Fig. 3. 24, where also indicated
are the defining geometric parameters of the unit. When ... series connection of
several base units. Figure 3.27 is a three-dimensional model of a serpentine
unit with the local reference frame. The in-plane compliances can be found
based on Fig. 3....
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 9 docx
... properties that define the coupled magnetic-mechanical behavior of
a piezomagnetic material are generally determined experimentally, and the
strain of Eq. (4. 144 ) can be found as a function of the ... bending moments and can be expressed according to the
engineering beam theory, as:
Equation (4. 133) took into consideration that bending of the two layers takes
place independentl...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 12 doc
... three-dimensional state of stress is the state of
plane stresses where the only non-zero stresses are the normal stress and
the tangential stress case where Eq. (5.190) reduces to:
The Tresca ... suggests‚ there is a relationship
between a guided-fixed column and a free-fixed one‚ the latter having the
length equal to one quarter the length of the former‚ as mentioned by
Timoshenko...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 5 pot
... end deflection and slope
can be found and expressed in the known manner:
The equations of the three global compliances entering Eqs. (2.166) are quite
complex and are not given explicitly here. ... determined with respect to the
free end.
Example 2.18
Find the bending-related compliances connected to the midpoint of a
microcantilever of length l and of constant cross-section i...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 7 pot
... the free displacement in terms of the defining
geometry.
172
Chapter 3
where is the out -of- the-plane stiffness of one curved spring. The six
out -of- the-plane compliances of a thin curved member ... the deflection at point 1
depends linearly on the temperature increase and non-linearly on the
geometric parameters defining the half bent beam. An example will be
analyzed next that st...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 8 pot
... order to enhance
the performance of the microdevice.
4. 1
Electromagnetic Transduction
The electromagnetic actuation and sensing are based on the interaction
between the electric current and an external ... in Fig. 4. 25 as a function of the fraction c and the distance
x, in the case where The relative force difference of Eq. (4. 26)
increases non-linearly with c increasing and...
Mechanics of Microelectromechanical Systems - N.Lobontiu and E.Garcia Part 10 potx
... the compliances above define any of the flexure microhinges that have
been analyzed in Chapter 2. The inertia force and moment are:
The unknown acceleration a can be determined when either the ... enable achieving the level of torque needed when
Answer:
Problem 4. 8
A microcantilever of given dimensions and
is used as an electrostatic actuator. Find the gap between the
microcantile...
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