... (SP) 1E-7, 1E3 2. 2 1.1E -2 1.7E-15 1E10 Based on Suetsugu, 19 93, 1.5 cmdia., 3. 1 cm lengthTurbomolecular (TM -2 ) 1E-6, 1E1 4 7 5E-14 1E7 Kenton, 20 03 Scroll (SCL -2 ) 1E-1, 1E3 . 12 25 7.8E-17 1E4 ... Denison, 1967Group 3: Mesoscale PumpsTurbomolecular (TM-4) 1E-5, 1E -2 4 2 2E-15 1E3 Experimental, fPϷ 1.7E3, 4 cmdia., Creare WebsitePeristaltic (PER) 1.6, 1E3 3. 3E -3 20 1E-16 6E2 Piltingsrud, ... (SCL) 2E -2 , 1E3 1.4 500 7.7E-16 5E4 Lafferty, p. 168Rotary Vane (RV) 2E -2 , 1E3 0.7 25 0 6.2E-16 5E4 CatalogGroup 2: Macroscale Kinetic and IonDrag (DR) 2E -2 , 1E3 36 33 00 1.9E-16 5E4 Molecular/RegenerativeLafferty...