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The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 2 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 1 ppt

... 1. 6, 1E3 3.3E-3 20 1E -1 6 6E2 Piltingsrud, 19 96Sputter Ion (SP) 1E-7, 1E3 2. 2 1. 1E -2 1. 7E -1 5 1E10 Based on Suetsugu, 19 93, 1. 5 cmdia., 3 .1 cm lengthTurbomolecular (TM -2 ) 1E-6, 1E1 4 7 5E -1 4 1E7 ... below 10 mTorr extract a significant energy penalty, tending to precludeMicroscale Vacuum Pumps 8 -2 1 0 .1 1 10 10 0pImTorr 10 11 1012 10 13 1014 10 15 10 16 10 17 1011 1012 10 13 10 14 10 15 10 16 10 17 Vp/N•Vp/NMIcro ... 1. E+ 12 1. E 22 1. E 21 1. E 20 1. E 19 1. E 16 1. E 17 1. E 18 1. E 15 1. E 14 1. E 13 1. E− 12 QNDDP (1 stage)DDP(30 stages)DIATM-4DIFSCL -2 TM -2 T/DRORBSCLSCWIsentropicReversible & isothermalGroup...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 3 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 3 ppt

... Spreaders 1 1 -2 5Modeling of Micro Heat Spreaders • Testing of Micro HeatSpreaders • Fabrication of Micro Heat Spreaders 11 .5 New Designs 1 1 -2 8 11 .6 Summary and Conclusions 1 1- 3 2 11 .1 IntroductionA ... Spreaders 11 .1 Introduction 1 1- 1 Fundamentals of Heat Pipe Operation 11 .2 Individual Micro Heat Pipes 1 1- 1 0Modeling Micro Heat Pipe Performance • Testing ofIndividual Micro Heat Pipes 11 .3 Arrays ... (20 03).© 20 06 by Taylor & Francis Group, LLCLaminar-incompressibleRevϽ 23 00, MavϽ 0 .2 (fvRev) ϭ 16 (11 .18 )C ϭ 1. 00Laminar-compressibleRevϽ 23 00, MavϾ 0 .2 (fvRev) ϭ 16 (11 .19 )C...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 4 pptx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 4 pptx

... and Micro Heat Spreaders 1 1- 1 20 06 by Taylor & Francis Group, LLC 12 MicrochannelHeat Sinks 12 . 1 Introduction 1 2- 1 12 . 2 Fundamentals of Convective Heat Transfer in Microducts 1 2- 2 Modes ... 12 0 14 0 16 0Length of the film, mmExp.Model 2 Model 1 Qmax, WFIGURE 11 .17 Comparison of the modeling and experimental results on microchanneled polymer films.(Reprinted withpermission from ... compute the capillary pumping pressure and the dynamic and frictional pressure drops in the 1 1- 3 0 MEMS: Applications Methanol,  =10 degree0.04.08.0 12 . 0 16 .0 20 .0 24 .00 20 40 60 80 10 0 12 0 ...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 2 ppsx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 2 ppsx

... MEMS: Applications 20 10 0 10 20 20 10 0 10 20 (b) 20 10 0 10 20 −30 20 10 0 10 20 30(a) 20 10 0 10 20 5 10 15 20 25 30(d) 20 10 0 10 20 5 10 15 20 25 30−3.0655− 2. 29 911. 5 327 −0.7663600.76636 1. 5 327 2. 29 91 3.0655(c)FIGURE ... the bubble 1 0 -1 0 MEMS: Applications FIGURE 10 .11 (See color insert following page 2- 1 2. )Bubble volume variation versus time for three different heaterdesigns under same heat flux of 1 .2 GW /m 2 , ... LLC 1 0 -1 2 MEMS: Applications Chamber neckHeater Chamber SpacerManifoldFIGURE 10 .15 The cross talk overcome by employing chamber neck.substrate, through which heat can be conducted to the...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 5 potx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 5 potx

... the boiling pattern.Microchannel Heat Sinks 1 2- 1 9050 10 0 15 0 20 0 25 03000 10 15 20 x (mm)T (°C)0 mL/min (0 kPa) 0 .25 mL/min (80 kPa) 1. 1 mL/min (16 0 kPa) 1. 8 mL/min ( 320 kPa)Device I, Dl ... researchers in the field of flow control. The three books by Gad- el- Hak et al. (19 98), Gad- el- Hak (20 00) and Gad- el- Hak and Tsai (20 05) pro-vide an up-to-date overview of the subject of flow ... associated with the CHF condition is the corresponding 1 2- 2 0 MEMS: Applications 757065605550454035 1 10 10 0 10 00T (°C)q (W/cm 2 )(b) 25 0 20 0 15 0 10 0500 5 10 15 20 25 300T (°C)q...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 6 potx

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 6 potx

... order, Gad- el- Hak and Blackwelder (19 87b; 19 89), Lumley (19 91; 19 96), Choi et al. (19 92) , Reynolds (19 93), Jacobson and Reynolds (19 93a; 19 93b; 19 94; 19 95; 19 98), Gad- el- Hak (19 93; 19 94; 19 96; 19 98; ... others, Bushnell (19 83; 19 94); Wilkinson et al. (19 88); Bushnell and McGinley (19 89); Gad- el- Hak (19 89; 20 00); Bushnell and Hefner (19 90); Fiedlerand Fernholz (19 90); Gad- el- Hak and Bushnell ... Laufer, 19 75; Willmarth, 19 75a; 19 75b; Saffman, 19 78; Cantwell, 19 81; Fiedler, 19 86; 19 88; Blackwelder, 19 88; 19 98; Robinson, 19 91; Delville et al., 19 98]. The paper by Robinson (19 91) in particular...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 8 pdf

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 8 pdf

... amplitude0 1 48 1 9 2 13 5 22 .5°AxisymmetricHelical (m= 1) m 0500 10 00 15 00 20 00 25 0030005 10 15 Helical mode phase 1 48φ 1 (deg.)Device # m Slope = 22 .2 Slope = 91 .2 Slope = 17 9 .2 1 9 2 13 5 22 .5°Device ... desired.Towards MEMS Autonomous Control of Free-shear Flows 1 5 -1 5 20 10 0 10 20 30400 20 40 60 80 10 0 12 0 14 0 2. 10 × 10 53 .15 × 10 54 .20 × 10 55 .25 × 10 5Change of normalizedroll moment (%)Re°(a) 20 10 0 10 20 30400 ... = 21 0 m/ s [M j = 0.6]0.050.070 .10 x/DForcing frequencyf (Hz)fu′u′ (m 2 /s 2 Hz) 10 –6 10 –5 10 –4 10 –3 10 2 10 1 100 10 –6 10 –5 10 –4 10 –3 10 2 10 1 1000 5000 10 000 15 000 20 000...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 9 pdf

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 2 Part 9 pdf

... a 1 5-3 2 MEMS: Applications X mm0 5 10 15 20 (a)X mm0 5 10 15 20 (b)X mm0 5 10 15 20 (c)X mm0 5 10 15 20 (d)FIGURE 15 .38 Phase-averaged stream line plots at different phases of the forcing ... result the sensorTowards MEMS Autonomous Control of Free-shear Flows 1 5 -2 9 MEMS sensor andactuator array MEMS sensorsDynamic separationReattachmentFlowFIGURE 15 .33 Control system components ... International Workshop on Micro ElectroMechanical Systems (MEMS ’96), pp. 19 24 , 11 15 February, IEEE, San Diego, California. 1 5-3 4 MEMS: Applications © 20 06 by Taylor & Francis Group, LLC...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 1 ppt

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 1 ppt

... Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2- 1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1 15 Toward MEMS Autonomous Control ... oscillations, experimental studies [Veijola et al., 19 95; 12 ξ 1 ᎏᎏ͙ 1 ෆϩෆ 2 ෆξෆϪ͙ 1 ෆϪෆ 2 ෆξෆωnᎏω 2 Ϫω 1 2- 1 0 MEMS: Applications 0 1 2 34560 0.5 1 1.5 2 Damping ratioNormalized frequency ... paper) 1. Microelectromechanical systems. 2. Detectors. 3. Microactuators. 4. Robots. I. Gad- el- Hak, Mohamed, 19 4 5- II. Mechanical engineering series (Boca Raton Fla.)TK7875 .M4 23 20 05 6 21 .3 81 dc22...
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The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 2 pot

The MEMS Handbook MEMS Applications (2nd Ed) - M. Gad el Hak Episode 1 Part 2 pot

... In monolithically integrated technology, the 2- 2 2 MEMS: Applications 05 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0Damping Ratioξ = 0.0ξ = 0 .1 ξ = 1. 0ξ = 1. 5Beam length ( m) Maximum deflection ( m) FIGURE ... Solid-State Sensors andActuators (Transducers ’97), pp. 28 3–86, IEEE, New York. 2- 2 8 MEMS: Applications © 20 06 by Taylor & Francis Group, LLC04080 12 0 16 0 20 0 24 0 28 00 5 10 15 20 25 30 ... radius r. The maximum stress is located around the fillets.© 20 06 by Taylor & Francis Group, LLC 2- 2 6 MEMS: Applications FIGURE 2. 14 (See color insert following page 2- 1 2. )Topview micrograph...
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