The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 9 ppsx

... microgrippers [Kim et al., 19 92 ; Keller and Howe, 19 95 ; 19 97 ; Greitmann, 19 96 ; Keller, 19 98 a; 19 98 b; Ok et al., 19 99 ] and will be further described in Section 7.5 .1. To e x t e nd this serial assembling approach ... published [Trimmer and Jebens, 19 89; Dario et al., 19 92 ; Shimoyama, 19 95 b; Fearing, 19 98 ; Thornell, 19 98 ]. As stated in the prev...

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... Fujita, 19 93 ; 19 94 ; Goosen and Wolffenbuttel, 19 95 ; Liu et al., 19 95 ; Böhringer et al., 19 96 ; 19 97 ; Nakazawa et al., 19 97 ; 19 99 ; Suh et al., 19 97 ; 19 99 ; Hirata et al., 19 98 ; Kladitis et al., 19 99 ; ... 328–3 31, June 25– 29, Stockholm, Sweden. Mainz, I.f .M. , and GmbH. ( 19 99 , Sept 10 , 19 99 ).“Micro-Motors: The World’s Tiniest Helicopt...

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... 19 96 ; Ho and Tai, 19 96 , 19 98 ; Hogan, 19 96 ; Ouellette, 19 96 , 2003; Paula, 19 96 ; Robinson et al., 19 96 a, 19 96 b; Tien, 19 97 ; Amato, 19 98 ; Busch-Vishniac, 19 98 ; Kovacs, 19 98 ; Knight, 19 99 ; Epstein, 2000; O’Connor ... extremely small machines have been developed in recent years (Angell et al. , 19 83; Gabriel et al. , 19 88 , 19 92 ; O’Connor,...

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... Lemkin, Juneau et al., 19 99 ; Park et al., 19 99 ; McNie et al., 19 99 ; Noworolski and Judy, 19 99 ; Lehto, 19 99 ; Usenko and Carr, 19 99 ]. Lemkin and Boser ( 19 99 ) demonstrated the monolithic inte- gration ... In monolithically integrated technology, the 2-2 2 MEMS: Applications 0 5 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0 Damping Ratio ξ = 0.0 ξ = 0 .1 ξ...

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... 13 8 .1 11. 7 ⍀ cm, n-type 10 2.2 53.4 13 .6 0 0 0.5 1. 0 1. 5 10 16 10 16 10 17 10 18 10 19 10 20 10 17 10 18 10 19 10 20 0.5 1. 0 1. 5 N (cm −3 ) N (cm −3 ) P(N,T) P(N,T) p-Si n-Si T = −75°C T = −50°C T ... system. It can then be stated that: π l ϭ π 11 ϩ 2( π 44 ϩ π 12 Ϫ π 11 )(l 2 1 m 2 1 ϩ l 2 1 n 2 1 ϩ n 2 1 m 2 1 ) (3. 21) π t ϭ π 12...

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... ( 19 90 ) “Spiral Microstructures for the Measurement of Average Strain Gradients in Thin Films,” in Proc. 19 90 IEEE Conf. on Micro Electro Mechanical Systems (MEMS 90 ), pp. 17 7 18 1. 4-3 8 MEMS: Applications FIGURE ... and the mirror. 1 ᎏᎏᎏᎏ ΂ 6 ϫ (45 m) 2 Ϫ 3 ϫ (45 m) 2 ΃ 17 m ᎏ 545 m 2.5 m ϫ (1. 5 m) 3 ᎏᎏᎏ 12 tw 3 ᎏ 12 P ᎏ 6EI 17 m ᎏ 545 m dy ᎏ dx P ᎏ 6EI...

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... models, and thermodynamical mod- els. Some models are directly structured to describe the behavior of SMA fibers (a one-dimensional prob- lem), while other models are developed for more complex ... magnetic field. In 18 65, James Clerk Maxwell (18 65) developed the first com- prehensive theory on electromagnetic field, introducing the modern concepts of electromagnetic waves. Microactu...

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... [e.g.Wilkinson, 19 90 ; Gad- el- Hak, 19 94 ; Moin and Bewley, 19 94 ], and in the books by Gad- el- Hak et al. ( 19 98 ), Gad- el- Hak (2000) and Gad- el- Hak and Tsai (2005). The topic is also detailed in Chapters 13 , 14 ... ( 19 95 ) Thermal Anemometer 0.2 ϫ 0.2 Pan et al. ( 19 95 ) Floating element Capacitive Ϸ 0 .1 ϫ 0 .1 Padmanabhan ( 19 97 ) Floating...

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... ( 19 67) Schewe ( 19 83) Blake ( 19 86) Lauchle ( 19 87) Spalart ( 19 88) Choi & Moin ( 19 90 ) Farabee ( 19 91 ) p rms /␶ w Re u 8 7 6 5 4 3 2 1 0 10 2 10 3 10 4 10 5 1 333 19 33 66 7.2 21. 6 40 18 0 256 FIGURE ... pre- sented similar piezoelectric silicon microphones [Kim et al., 19 91 ; Kuhnel, 19 91 ; Schellin and Hess, 19 92 ; Schellin et al., 19 95 ], an...

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... 19 77; Bugdayci et al., 19 83; Darling et al., 19 84; Lee et al., 19 84; Nielsen et al., 19 85; Bhaskar et al., 19 85; Allen et al., 19 85; Krause et al., 19 95 ; Chen et al., 19 95 ; Tseng et al., 19 96 ; ... 19 85; Allen et al., 19 85]. Many other designs also are reported in the literature [for example, Krause et al., 19 95 ; Chen et al., 19 95 ; Tseng et al., 19 9...

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