The MEMS Handbook MEMS Applications (2nd Ed) - M Gad el Hak Episode 1 Part 2 pot

... In monolithically integrated technology, the 2- 2 2 MEMS: Applications 0 5 10 15 20 10 0 11 0 12 0 13 0 14 0 15 0 Damping Ratio ξ = 0.0 ξ = 0 .1 ξ = 1. 0 ξ = 1. 5 Beam length ( m) Maximum deflection ( m) FIGURE ... Solid-State Sensors and Actuators (Transducers ’97), pp. 28 3–86, IEEE, New York. 2- 2 8 MEMS: Applications © 20 06 by Taylor & Francis Group, LLC...

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... transformation of the coordinate system. It can then be stated that: π l ϭ π 11 ϩ 2( π 44 ϩ π 12 Ϫ π 11 )(l 2 1 m 2 1 ϩ l 2 1 n 2 1 ϩ n 2 1 m 2 1 ) (3. 21 ) π t ϭ π 12 Ϫ ( π 44 ϩ π 12 Ϫ π 11 )(l 2 1 l 2 2 ϩ ... n-type 10 2. 2 53.4 13 .6 0 0 0.5 1. 0 1. 5 10 16 10 16 10 17 10 18 10 19 10 20 10 17 10 18 10 19 10 20 0....

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... links the spoked wheel to the mirror π 2 ϫ 15 5 ϫ 10 9 N /m 2 ϫ 3.3 ϫ 10 25 m 4 ᎏᎏᎏᎏᎏ 4 ϫ (300 ϫ 10 Ϫ6 m) 2 π 2 EI ᎏ 4L 2 4 ϫ 10 Ϫ6 m ϫ (1 ϫ 10 Ϫ6 m) 3 ᎏᎏᎏ 12 wt 3 ᎏ 12 4-3 0 MEMS: Applications FIGURE ... V) 2 ᎏᎏᎏᎏᎏᎏᎏ (1 ϫ 10 Ϫ6 m) 2 ε 0 ε r xzV 2 ᎏ y 2 8.854 10 Ϫ 12 F /m ϫ 1 ϫ 40 ϫ 10 Ϫ 6 m ϫ 6 ϫ 10 Ϫ 6 m ϫ (80 V) 2...

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... Group, LLC 12 Microchannel Heat Sinks Yitshak Zohar 1 2 -1 13 Flow Control Mohamed Gad- el- Hak 1 3 -1 14 Reactive Control for Skin-Friction Reduction Haecheon Choi 1 4 -1 15 Toward MEMS Autonomous Control ... oscillations, experimental studies [Veijola et al., 19 95; 1 ᎏ 2 ξ 1 ᎏᎏ ͙ 1 ෆ ϩ ෆ 2 ෆ ξ ෆ Ϫ ͙ 1 ෆ Ϫ ෆ 2 ෆ ξ ෆ ω n ᎏ ω 2 Ϫ ω 1 2 -1 0 MEMS: Ap...

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... models, and thermodynamical mod- els. Some models are directly structured to describe the behavior of SMA fibers (a one-dimensional prob- lem), while other models are developed for more complex ... Transformation Cycle,” Int. J. Eng. Sci., 37, pp. 11 41 11 73. d ᎏ 2 d ᎏ 2 d ᎏ 2 d ᎏ 2 ∂T N ᎏ ∂x d ᎏ 2 ∂T S ᎏ ∂x d ᎏ 2 d ᎏ 2 ∂T P ᎏ ∂x d ᎏ 2 ∂T S ᎏ ∂x d ᎏ 2 d ᎏ 2 d ᎏ 2 d ᎏ...

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... [e.g.Wilkinson, 19 90; Gad- el- Hak, 19 94; Moin and Bewley, 19 94], and in the books by Gad- el- Hak et al. (19 98), Gad- el- Hak (20 00) and Gad- el- Hak and Tsai (20 05). The topic is also detailed in Chapters 13 , 14 ... of the two sensors can be expressed as: U 2 A,eff ϭ (U 1 cos α 1 Ϫ U 2 sin α 1 ) 2 ϩ k 2 T (U 1 cos α 1 ϩ U 2 sin α 1 )...

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... (19 67) Schewe (19 83) Blake (19 86) Lauchle (19 87) Spalart (19 88) Choi & Moin (19 90) Farabee (19 91) p rms /␶ w Re u 8 7 6 5 4 3 2 1 0 10 2 10 3 10 4 10 5 1 333 19 33 66 7 .2 21 . 6 40 18 0 25 6 FIGURE ... at 50 m/ s 6,7 20 7 21 . 0 2 31 Parallel Configuration at 50 m/ s 5.6 19 2 17 .3 16 0 Thermal capacity, (µJ/K) 1. 2 37 — — Thermal time-consta...

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... of micropump developed by Sen et al. (Reprinted with permission from Sen, M. , Wajerski, D., and Gad- el- Hak, M. [19 96] “A Novel Pump for MEMS Applications, ” J. of Fluids Eng. 11 8, pp. 624 – 627 .) © ... publication ,the term MEMS- based microrobot”is introduced and used .The term MEMS- based microrobot” differs from the notation originally used by Dario et al., but the co...

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... pp. 328 –3 31, June 25 29 , Stockholm, Sweden. Mainz, I.f .M. , and GmbH. (19 99, Sept 10 , 19 99).“Micro-Motors: The World’s Tiniest Helicopter,” Retrieved March 16 , 20 00, 20 00, from http://www.imm-mainz.de/english/developm/products/hubi.html. Masuzawa,T. ... Systems (MEMS ’98), Jan. 25 29 , pp. 93–98, Heidelberg, Germany, IEEE. 7-3 6 MEMS: Applications © 20 06 by Taylor...

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... 1. 6, 1E3 3.3E-3 20 1E -1 6 6E2 Piltingsrud, 19 96 Sputter Ion (SP) 1E-7, 1E3 2. 2 1. 1E -2 1. 7E -1 5 1E10 Based on Suetsugu, 19 93, 1. 5 cm dia., 3 .1 cm length Turbomolecular (TM -2 ) 1E-6, 1E1 4 7 5E -1 4 1E7 ... below 10 mTorr extract a significant energy penalty, tending to preclude Microscale Vacuum Pumps 8 -2 1 0 .1 1 10 10 0 p I mTorr 10 11 10 12 10 13 10...

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