The MEMS Handbook (1st Ed) - M. Gad el Hak Part 14 potx

... 10 . Typical Man-Made Devices 10 20 10 18 10 16 10 14 10 12 10 10 10 8 10 6 10 4 10 2 10 2 10 0 10 -2 10 -4 10 -6 10 -8 10 -1 0 10 -1 2 10 -1 4 10 -1 6 Diameter of Proton â 2002 by CRC Press LLC ... we review the status of our understanding of fluid flow physics particular to microde- vices. The chapter is an update of an earlier...

Ngày tải lên: 10/08/2014, 02:21

... a cross-flow heat exchanger constructed from a stack of 50 14-mm ì 14-mm foils, each containing 34 20 0- à m-wide ì 10 0- à m-deep channels machined into the 20 0- à m-thick ... microcutters. These methods and the characteristics of the resulting flow channels are discussed elsewhere in this handbook. Microchannels offer advantages due to their high surfac...

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... Effects in Electrophoretic Cells: Convective-Diffusive Transport Aspects,” Electrophoresis 21, pp. 1026–1 033 . Brandner, J., Fichtner, M., Schygulla, U., and Schubert, K. (2000) “Improving the Efficiency ... Effects in Electrophoretic Cells: Convective-Diffusive Transport Aspects,” Electrophoresis 21, pp. 1026–1 033 . Brandner, J., Fichtner, M., Schygulla, U., and Schubert, K. (2000) “Imp...

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... properties of the system and the long-term or steady-state perfor- mance of the system. The first section considers “classical control,” which is the study of single-input, single-output (SISO) ... MEMS technology are controls-related because of the utility of MEMS devices in sensor and actuator technologies. Because the area of control is far too vast to be entirely presente...

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... slopes of the V-groove are a well-defined 54.74°, and the actual etch rate R 111 is related to the rate of V-groove widening R v through: (16.41) with R 111 the etch rate in nm/min and R v the groove ... slopes of the V-groove are a well-defined 54.74°, and the actual etch rate R 111 is related to the rate of V-groove widening R v through: (16.41) with R 111 the etch ra...

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... pp. 191–198. Anderer, B., W. Ehrfeld, and D. Munchmeyer, “Development of a 10 Channel Wavelength Division Multiplexer/Demultiplexer Fabricated by an X-Ray Micromachining Process,” SPIE, 101 4, 17–24, 1988. Becker, ... pp. 191–198. Anderer, B., W. Ehrfeld, and D. Munchmeyer, “Development of a 10 Channel Wavelength Division Multiplexer/Demultiplexer Fabricated by an X-Ray Micromachining Proc...

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... and other nonelectrical parameters to electrical/electronic signals; as actuators, MEMS devices transform electrical/electronic signal to nonelectrical/electronic operations. Therefore, MEMS ... cavity. Notice the curvature in the cavity, which is characteristic of the ECE process. (b) Top view of patterned piezoresistors in n-type 6H-SiC. p-type 6H-SiC etch-stop epilayer n + -type...

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... when the temperature of the heated part was reduced considerably. A clear drawback of this micro-hot-film is the proximity of the heated part of the sensor to the surface of the chip, rendering the ... have presented a MEMS- based triple- hot-wire sensor, shown schematically in Figure 26.16. The x- and y-hot-wires are located in the wafer plane while the z-wire is ro...

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... Interference in Out-of-Plane Structures Surface-micromachined parts typically have a thickness that is very small in relationship to their width or breadth. In the out-of-plane direction, the thickness ... interfere with each other when it was the intended for them to clear each other without touching. Both of these instances will be examined separately. An example of the out-of-plane...

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... pneumatic, piezoelectric, thermal bubble, thermal buckling, focused acoustic-wave and electrostatic actuations. The basic principles of those droplet generators are introduced in the following sections. ... these methods have employed the principle of creating pressure differences, either by lowering the outer pressure or increasing the inner pressure of a nozzle, to push or pull li...

Ngày tải lên: 10/08/2014, 02:21