An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... Improvements and Methods,” Tech.
Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8 11,
19 98, pp. 7–10.
[43] U.S. Patent 6,533,366, March 18, 2003.
[44] U.S. Patents 4 ,82 4,073, ... Int.
Conf. on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1997, Vol. 2,
pp. 84 7 85 0.
130 MEM Structures and Systems in Industrial and Automotive Applica...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... components for identify-friend-or-foe
systems
Head- and night-display systems
Low-power, high-density mass data storage devices
Embedded sensors and actuators for condition-based maintenance
Integrated ... general support and for recognizing the value of an introductory book
on MEMS. I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for
reading the manuscript...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... the anisotropic etching of cavities in {100}-oriented silicon: (a) cavities,
self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching from both sides of
the wafer can yield ... Wet etchants in aqueous solution offer the advantage of low-cost batch
fabrication—25 to 50 100-mm-diameter wafers can be etched simultaneously and
can be either of the isotropic or aniso...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... Structures and Systems in Industrial and Automotive Applications
Bondpad
Metal conductors
P-type diffused
piezoresistor
Etched cavity
N-type
epitaxial
layer
P-type
substrate
and frame
Anodically
bonded
Pyrex ... 9 .81 m/s
2
), sensitivity (V/G), reso
-
lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The
range and bandwidth required vary significantly...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx
... discrete
inductors (in addition to even more capacitors and resistors) along with only 15
integrated circuits [12]. To alleviate the self-resonance shortcoming and to reduce
the part count and space ... of expansion mismatch factor into substrate
selection.
Passive Electrical Components: Capacitors and Inductors
Quality Factor and Parasitics in Passive Components
All capacit...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... affecting the validity of any trade
-
mark or service mark.
International Standard Book Number: 1-5 80 5 3-5 9 0-9
10 987 654321
To our families
Tanya, Ella, and Jad
Erika, Gordon, Brynn, and Reed
“It was the ... student alike to an understanding of how MEMS are
designed and fabricated. Dr. Maluf s book concentrates mostly on how to design
and manufacture MEMS....
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... meaning lithography, elec
-
troplating, and molding.
both PSG and BPSG soften and flow to conform with the underlying surface topog
-
raphy and to improve step coverage. LTO films are used for passivation ... quickly extended to
a broad range of other alloys, including titanium-nickel, copper-aluminum-nickel,
iron-nickel and iron-platinum alloys. A basic understanding...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... Microactuators, and Microsystems
(MEMS) ,” Proceedings of the IEEE, Vol. 86 , No. 8, August 19 98.
Summary 77
and with electroplating in the production of ink-jet nozzles. Due to its speed, low
cost, and ... Sensor and Actuator Workshop, Hilton Head Island, SC, June 6–9, 1 988 ,
pp. 144–147.
[19] Schmidt, M.A, “Wafer -to- Wafer Bonding for Microstructure Formation,” Proceedings...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dioxide
insulator
TaAl resistor
Al conductor
1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl,
pattern Al again to form resistor and conductive trace.
2. PEC...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... unloaded actuator on the right-hand side is equal to the
mass of the loaded actuator (left-hand side) and the mirror. Externally applied
in-plane accelerations cause equal but opposite torques on ... processing and routing of data and voice. The use of tunable lasers in
telecommunications has been primarily in the wavelength range of 1,5 28 nm to
1,565 nm (known as the C-Band) and...