An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt

... Improvements and Methods,” Tech. Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8 11, 19 98, pp. 7–10. [43] U.S. Patent 6,533,366, March 18, 2003. [44] U.S. Patents 4 ,82 4,073, ... Int. Conf. on Solid-State Sensors and Actuators, Chicago, IL, June 16–19, 1997, Vol. 2, pp. 84 7 85 0. 130 MEM Structures and Systems in Industrial and Automotive Applica...

Ngày tải lên: 10/08/2014, 01:22

... components for identify-friend-or-foe systems Head- and night-display systems Low-power, high-density mass data storage devices Embedded sensors and actuators for condition-based maintenance Integrated ... general support and for recognizing the value of an introductory book on MEMS. I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for reading the manuscript...

Ngày tải lên: 10/08/2014, 01:22

... the anisotropic etching of cavities in {100}-oriented silicon: (a) cavities, self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching from both sides of the wafer can yield ... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication—25 to 50 100-mm-diameter wafers can be etched simultaneously and can be either of the isotropic or aniso...

Ngày tải lên: 10/08/2014, 01:22

... Structures and Systems in Industrial and Automotive Applications Bondpad Metal conductors P-type diffused piezoresistor Etched cavity N-type epitaxial layer P-type substrate and frame Anodically bonded Pyrex ... 9 .81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantly...

Ngày tải lên: 10/08/2014, 01:22

... discrete inductors (in addition to even more capacitors and resistors) along with only 15 integrated circuits [12]. To alleviate the self-resonance shortcoming and to reduce the part count and space ... of expansion mismatch factor into substrate selection. Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components All capacit...

Ngày tải lên: 10/08/2014, 01:22

... affecting the validity of any trade - mark or service mark. International Standard Book Number: 1-5 80 5 3-5 9 0-9 10 987 654321 To our families Tanya, Ella, and Jad Erika, Gordon, Brynn, and Reed “It was the ... student alike to an understanding of how MEMS are designed and fabricated. Dr. Maluf s book concentrates mostly on how to design and manufacture MEMS....

Ngày tải lên: 10/08/2014, 01:22

... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are used for passivation ... quickly extended to a broad range of other alloys, including titanium-nickel, copper-aluminum-nickel, iron-nickel and iron-platinum alloys. A basic understanding...

Ngày tải lên: 10/08/2014, 01:22

... Microactuators, and Microsystems (MEMS) ,” Proceedings of the IEEE, Vol. 86 , No. 8, August 19 98. Summary 77 and with electroplating in the production of ink-jet nozzles. Due to its speed, low cost, and ... Sensor and Actuator Workshop, Hilton Head Island, SC, June 6–9, 1 988 , pp. 144–147. [19] Schmidt, M.A, “Wafer -to- Wafer Bonding for Microstructure Formation,” Proceedings...

Ngày tải lên: 10/08/2014, 01:22

... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PEC...

Ngày tải lên: 10/08/2014, 01:22

... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... processing and routing of data and voice. The use of tunable lasers in telecommunications has been primarily in the wavelength range of 1,5 28 nm to 1,565 nm (known as the C-Band) and...

Ngày tải lên: 10/08/2014, 01:22