An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 6 pptx
... orientation-dependent
etching of grooves, wafer bonding, and dicing [8], and (b) nozzle formed by DRIE and wafer
bonding. (After: [9].)
Mandrel
Photoresist
1. Make mandrel, pattern photoresist
Metal
2. ... 9.81 m/s
2
), sensitivity (V/G), reso
-
lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The
range and bandwidth required vary significantly depend...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx
... components for identify-friend-or-foe
systems
Head- and night-display systems
Low-power, high-density mass data storage devices
Embedded sensors and actuators for condition-based maintenance
Integrated ... general support and for recognizing the value of an introductory book
on MEMS. I would like to thank Greg Kovacs, Kirt Williams, and Denise Salles for
reading the manuscript...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 4 pptx
... mask
a
0.707a
54.74°
{100}
{111}
{100}
{111}
Self-limiting
etches
Membrane
<100>
{110}
Figure 3 .6 Illustration of the anisotropic etching of cavities in {100}-oriented silicon: (a) cavities,
self-limiting pyramidal and V-shaped pits, and thin membranes; and (b) etching from ... Wet etchants in aqueous solution offer the advantage of low-cost batch
fabrication—25 to 50 100-mm-d...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 11 pptx
... of expansion mismatch factor into substrate
selection.
Passive Electrical Components: Capacitors and Inductors
Quality Factor and Parasitics in Passive Components
All capacitors and inductors ... shortcoming and to reduce
the part count and space used on a printed circuit board, low-cost, high-
performance on-chip inductors are desirable.
Example inductor parameters needed for u...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 1 doc
... student alike to an understanding of how MEMS are
designed and fabricated. Dr. Maluf s book concentrates mostly on how to design
and manufacture MEMS. This is to be expected of Dr. Maluf, who has ... affecting the validity of any trade
-
mark or service mark.
International Standard Book Number: 1-5 805 3-5 9 0-9
1098 765 4321
To our families
Tanya, Ella, and Ja...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 3 pps
... meaning lithography, elec
-
troplating, and molding.
both PSG and BPSG soften and flow to conform with the underlying surface topog
-
raphy and to improve step coverage. LTO films are used for passivation ... quickly extended to
a broad range of other alloys, including titanium-nickel, copper-aluminum-nickel,
iron-nickel and iron-platinum alloys. A basic understanding...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 5 doc
... 1990, pp. 361 2– 363 2.
[8] Schnakenberg, U., W. Benecke, and P. Lange, “TMAHW Etchants for Silicon
Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran-
cisco, CA, ... Sensor and Actuator Workshop, Hilton Head,
SC, June 1998, pp. 1 56 161 .
[ 26] MicroChem Corp., Data Sheet for NANO SU-8 2000, Newton, MA, February 2002.
[27] Mikroglas Teknik AG, “FOTURA...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 7 pot
... )]°⋅sHz
; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat-
ter two being functions of noise and bandwidth. Short- and long-term drift of the
output, known as bias drift, is another ... dioxide
insulator
TaAl resistor
Al conductor
1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl,
pattern Al again to form resistor and conductive trace.
2. PEC...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 8 ppt
... Tech. Digest Solid-State Sen
-
sor and Actuator Workshop, Hilton Head Island, SC, June 3 6, 19 96, pp. 200–204.
[39] Allen, R. R., J. D. Meyer, and W. R. Knight, “Thermodynamics and Hydrodynamics ... 41–45.
[41] “Under-Glass Controls: Creative Cooktop Delivers High Power and Fast Boiling,” Appli
-
ance Manufacturer, July 19 96, pp. 61 63 .
[42] Anderson, R. C., et al., “Genet...
An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 9 pps
... unloaded actuator on the right-hand side is equal to the
mass of the loaded actuator (left-hand side) and the mirror. Externally applied
in-plane accelerations cause equal but opposite torques on ... processing and routing of data and voice. The use of tunable lasers in
telecommunications has been primarily in the wavelength range of 1,528 nm to
1, 565 nm (known as the C-Band) and...