An Introduction to MEMs Engineering - Nadim Maluf and Kirt Williams Part 2 pptx

... 1 .2 Analysis and Forecast of Worldwide MEMS Markets (in Millions of U.S. Dollars) 20 02 2007 ($ 000,000) ($ 000,000) Microfluidics 1,404 2, 241 Optical MEMS 7 02 1, 826 RF MEMS 39 24 9 Other actuators ... Market Study,” January 1999, 1 429 North Quincy Street, Arlington, VA 22 207. [3] Frost and Sullivan, “World Sensors Market: Strategic Analysis,” Report 550 9-3 2, Febr...

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... it is to achieve good bonding [21 ]. Grinding, Polishing, and Chemical-Mechanical Polishing Some applications use a thin layer of silicon (5 to 20 0 µm) that is fusion-bonded to a standard-thickness ... Wet etchants in aqueous solution offer the advantage of low-cost batch fabrication 25 to 50 100-mm-diameter wafers can be etched simultaneously and can be either of the isotropic o...

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... Structures and Systems in Industrial and Automotive Applications Bondpad Metal conductors P-type diffused piezoresistor Etched cavity N-type epitaxial layer P-type substrate and frame Anodically bonded Pyrex ... 9.81 m/s 2 ), sensitivity (V/G), reso - lution (G), bandwidth (Hz), cross-axis sensitivity, and immunity to shock. The range and bandwidth required vary significantl...

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... there are 24 discrete inductors (in addition to even more capacitors and resistors) along with only 15 integrated circuits [ 12] . To alleviate the self-resonance shortcoming and to reduce the part ... of expansion mismatch factor into substrate selection. Passive Electrical Components: Capacitors and Inductors Quality Factor and Parasitics in Passive Components All capacitor...

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... and Media Isolation 22 2 Hermetic Packaging 22 3 Calibration and Compensation 22 4 Die-Attach Processes 22 5 Wiring and Interconnects 22 7 Electrical Interconnects 22 7 Microfluidic Interconnects 23 1 Optical ... Micro; and Stephen Durant and Christopher Eide of Morrison and Foerster. Evan Green and Carter Hand of New Focus were kind enough to review portions of the man...

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... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” in The MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press, 20 02. [10] Zhang, Z. L., and ... meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage....

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... 36 12 36 32. [8] Schnakenberg, U., W. Benecke, and P. Lange, “TMAHW Etchants for Silicon Micromachining,” Proc. 1991 Int. Conf. on Solid-State Sensors and Actuators, San Fran- cisco, CA, June 24 27 , ... 156–161. [26 ] MicroChem Corp., Data Sheet for NANO SU-8 20 00, Newton, MA, February 20 02. [27 ] Mikroglas Teknik AG, “FOTURAN—A Photostructurable Glass,” Mainz, Germany, 20 03....

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... )]°⋅sHz ; bandwidth (Hz); resolution (º/s); and dynamic range (dB), the lat- ter two being functions of noise and bandwidth. Short- and long-term drift of the output, known as bias drift, is another ... dioxide insulator TaAl resistor Al conductor 1. Grow oxide for insulator, sputter TaAl and Al, pattern Al and TaAl, pattern Al again to form resistor and conductive trace. 2. PE...

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... Netherlands, January 29 –February 2, 1995, pp. 21 6 21 9. [46] U.S. Patent 6, 523 ,560 B1, February 25 , 20 03, and U.S. Patent application publication US20 02/ 0174891 A1, November 28 , 20 02. [47] Williams, ... Netherlands, January 29 –February 2, 1995, pp. 19 24 . Selected Bibliography Frank, R., Understanding Smart Sensors, Norwood, MA: Artech House, 1996. Gad-El-Hak, M., The...

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... unloaded actuator on the right-hand side is equal to the mass of the loaded actuator (left-hand side) and the mirror. Externally applied in-plane accelerations cause equal but opposite torques on ... processing and routing of data and voice. The use of tunable lasers in telecommunications has been primarily in the wavelength range of 1, 528 nm to 1,565 nm (known as the C-Band) and...

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