... 15Polyvinylidene-fluoride(PVDF)d 31 = 23 d 33 = 33 12 1.78 3 2.7LiNbO 3 d 31 =−4, d 33 = 23 28 4.6 245 34 BaTiO3 d 31 = 78, d 33 = 190 1,700 5.7 30 PZT d 31 =−171 d 33 = 37 0 1,700 7.7 53 30zinc oxide (ZnO) d 31 = 5.2, d 33 = ... abformung, meaning lithography, elec - troplating, and molding. both PSG and BPSG soften and flow to conform with the underlying surface topog - raphy and to improve step coverage. LTO films are ... Zorman, C. A., and M. Mehregany, “Materials for Microelectromechanical Systems,” inThe MEMS Handbook, Chapter 15, M. Gad-el-Hak (ed.), Boca Raton, FL: CRC Press,2002.[10] Zhang, Z. L., and...