Basic Theory of Plates and Elastic Stability - Part 16 ppt
Micromachining Techniques for Fabrication of Micro and Nano Structures Part 16 pptx
... structure of the power sensor. left-hand : top view, right-hand-side sectional view along A-A’. Step 1: Description of the Physical Problem: A sectional view of the configuration of the sensor ... http://www.intechopen.com/articles/show/title/mems-gyroscopes-for- consumers -and- industrial-applications Shanmugavalli, M. Uma, G. Vasuki, B. & Umapathy, M. (2006). Design and Si...
Ngày tải lên: 21/06/2014, 02:20
Micromachining Techniques for Fabrication of Micro and Nano Structures Part 1 ppt
... Photoresist is exposed to a set of lights through a mask often made of quartz. Wavelength of light ranges from 30 0-5 00 nm (UV) and X-rays (wavelengths 4-5 0 Angstroms). Two types of photoresist are used: ... three-dimensional microstructures. It is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). MEMS usually consist of three major parts:...
Ngày tải lên: 21/06/2014, 02:20
Micromachining Techniques for Fabrication of Micro and Nano Structures Part 14 ppt
... SiH 4 + CH 4 550 o C-700 o C 750 o C-900 o C 700 o C-800 o C 400 o C-500 o C 400 o C-500 o C 400 o C-500 o C 400 o C-500 o C 900 o C-1050 o C Table 1. Examples of LPCVD processes. ... Fabrication and Analysis, AIM 2010, 97 8-1 -4 24 4-8 03 0-2 /10 ©2010 IEEE, pp. 118 6- 1190. Kulkarni, A. V., V. K. Jain, V.K. and Misra, K.A. (2010a). Simultaneous Microchannel For...
Ngày tải lên: 21/06/2014, 02:20
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