... process plans invoke changes in the com-position of all manufacturing cells so that lower capital investment in ma-chines, more independent manufacturing cells and higher machine utilization can ... of semiconductor manufacturing systems: A Petri net ap-proach, IEEE Trans. Semicond. Manuf., Vol. 11, No. 3, pp. 333-357, (Spe-cial section on Petri nets in semiconductor manufacturing) . Zurawski, ... Trans. Ind. Electron., Vol. 41, No. 6, pp. 567-583, (Special sec-tion on Petri nets in manufacturing) . Manufacturing the Future: Concepts, Technologies & Visions 196In addition, they analyzed...