... because of the self-orderinggrowth. The annealing of those films caused the forma-tion of crystalline Ge clusters with larger sizes . Further-more, the regular spatial arrangement of clusters ... composite target, a SiO2(99.99%) plate partially covered by polycrystalline chips of Si and Ge, and a second target of pure SiO2. Th e surfaceratio of the Si and Ge pieces in the SiO2target was ... 6:341http://www.nanoscalereslett.com/content/6/1/341Page 2 of 7NANO EXPRESS Open Access Low-temperature fabrication of layered self-organized Ge clusters by RF-sputteringSara RC Pinto1*, Anabela G...