Micromachining Techniques for Fabrication of Micro and Nano Structures Part 9 docx

... Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 199 9 © 199 9 by CRC Press LLC © 199 9 by CRC Press LLC If any instrument is used to count the number of spots and ... a power law of the form (Mandelbrot, 198 2; Voss, 198 8; Majumdar and Tien, 199 0; Majumdar and Bhushan, 199 0): (4.3.16) where 1 < D < 2 is the fractal dimension of the...

Ngày tải lên: 18/10/2013, 09:15

... Lubrication Studies Using Atomic Force/Friction ” Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 199 9 © 199 9 by CRC Press LLC © 199 9 by CRC Press LLC References ... 8.2 Nanodeformation, Adhesive Forces, and Molecular Conformation Nanodeformation behavior of the bonded lubricant was studied using atomic force microscopy (AFM) by B...

Ngày tải lên: 18/10/2013, 09:15

... al. ( 199 0, 199 1a,c), Mate ( 199 3a,b), Bhushan et al. ( 199 4a–c,e, 199 5a–g, 199 7c, 199 8), Ruan and Bhushan ( 199 4a–c), Koinkar and Bhushan ( 199 6a,b, 199 7a,b), and Sundararajan and Bhushan ( 199 8). Koinkar ... in micro- and nanostructures used in magnetic storage systems, microelectromechanical systems (MEMS), and other industrial applications (Bhushan, 199 2, 199 3,...

Ngày tải lên: 18/10/2013, 09:15

... undoped and doped silicon and polysilicon films and SiC films that are used in MEMS devices (Bhushan, 199 6b, 199 7, 199 8; Bhushan et al., 199 4, 199 7a,b, 199 8; Li and Bhushan, 199 8; Sundararajan and ... in the range of a couple to a few thousand microns (for an early review, see Peterson, 198 2; for recent reviews, see Muller et al., 199 0; Madou, 199 7; Trimmer, 199 7; a...

Ngày tải lên: 25/10/2013, 12:15

... ϖ δ , . P Ka R Ka R a R R K =− π −π =− π       33 222 2 13 3 2 ϖ ϖ δ ϖ , . Burnham, N.A. and Kulik, A.J. “Surface Forces and Adhesion” Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 199 9 © 199 9 by CRC Press LLC © 199 9 by CRC Press ... force upon separation of the tip and sample is often referred to as the pull-off force. Unfort...

Ngày tải lên: 09/11/2013, 03:15

... (McClelland, 198 9; McClelland and Cohen, 199 0). In addition, molecular dynam- ics computer simulations (Schoen et al., 198 9; Landman et al., 199 0; Thompson and Robbins, 199 0; Robbins and Thompson, 199 1) ... Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press LLC, 199 9 © 199 9 by CRC Press LLC © 199 9 by CRC Press LLC because some of these are conn...

Ngày tải lên: 17/12/2013, 11:15

... et al., 199 1) and, on the other hand, to new detection schemes, in particular to the optical beam deflection method (Meyer and Amer, 198 8, 199 0b; Alexander et al., 198 9; Marti et al., 199 0). Historically, ... some fundamental aspects of friction on an atomic scale (Zhong and Tománek, 199 0; Tománek et al., 199 1; Colchero and Marti, 199 5; Colchero et al., 199 6b; Gyalog et al.,...

Ngày tải lên: 25/12/2013, 23:18

... et al., 199 3; Bhushan et al., 199 5, 199 6, 199 7; Bhushan and Gupta, 199 5; Gupta and Bhushan, 199 5a, b; Bhushan, 199 6; Patton and Bhushan, 199 6; Bhushan and Li, 199 7; Li and Bhushan, 199 8b,c). Depth ... Perry, 198 1, 198 3; Jacobson et al., 198 3; Valli, 198 6; Bhushan, 198 7; Steinmann et al., 198 7; Stone et al., 198 8; Wu et al., 198 9, 199 0b; Wu, 199 0, 199 1; Bhusha...

Ngày tải lên: 25/12/2013, 23:18

... Kaneko, 199 2; Miyamoto et al., 199 1, 199 3; Bhushan, 199 5; Bhushan et al., 199 4b–e, 199 5a–f, 199 6, 199 7a,b; Koinkar and Bhushan, 199 6a,b, 199 7b,c; Kulkarni and Bhushan, 199 6a,b, 199 7; DeVecchio ... ( 199 1), Sarid and Elings ( 199 1), Binnig ( 199 2), Durig et al. ( 199 2), Frommer ( 199 2), Meyer ( 199 2), Marti and Amrein ( 199 3), and Guntherodt et al. (...

Ngày tải lên: 23/01/2014, 04:20

... (Libioulle et al., 199 1; Stoll, 199 2; Durselen et al., 199 5; Fu, 199 5) shows that the dominant term is (2 .90 ) where z is the excursion of the piezo, V the applied voltage, and A and B two coefficients ... triangle of period 40 between 356 and 396 , a triangle of period 20 between 400 and 420, a triangle of period 12 between 430 and 442, and, finally, delta pulses (1 wi...

Ngày tải lên: 27/01/2014, 14:20