Micromachining Techniques for Fabrication of Micro and Nano Structures Part 3 doc
Handbook of Micro and Nano Tribology P4
... ()()()()()222 132 32 32 2 34 1412 34 32 24 33 2115 3 .ln for for DD = 15.© 1999 by CRC Press LLCOne of the properties of naturally occurring wiggly objects is that if a small part of the object ... aDaanLDDaDLDDaaLDcDDLDcLDccL=+π=−()+π−()−∫∫−()−−()−()−()−()22012 32 222 132 32 32 222 3 24 33 2112 forfor for .ln .DHa aEG a aaDLcLLc≠=+π=15 31 5 34 1412 34 32 A n a adaDDaraLL=()=−∫02Aa ... for variation of oneparameter keeping the others constant. Figures 4 .31 b and 4 .32 b correspondingly show the fraction of thereal area of contact in elastic deformation. For D = 1.5 and φ = 0.01...
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Handbook of Micro and Nano Tribology P8
... M. (1992b), “Atomic-Force-Microscope Study of Polymer Lubricants on Silicon Surface,” Phys.Rev. Lett. 68, 33 23 33 26.Mate, C. M. (19 93) , “Nanotribology of Lubricated and Unlubricated Carbon ... overview of lubrication studies of polar and nonpolar lubricants and Lang-muir–Blodgett and chemically grafted films, using atomic force/friction force microscopy. 8.2 Nanodeformation, Adhesive Forces, ... LubricationStudies Using AtomicForce/Friction Force Microscopy Bharat Bhushan 8.1 Introduction8.2 Nanodeformation, Adhesive Forces, and Molecular Conformation8 .3 Boundary Lubrication Studies...
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Handbook of Micro and Nano Tribology P14
... Appl. Phys. 75, 5741–5746. With permission.)Bhushan, B. Micro/ Nanotribology and Micro/ Nanomechanics of Magnetic ” Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press ... (GPa)Macroscaleb Nano at 2 mN MicroSample σ P-VaMicroscale Initial FinalAl2O 3 0.97 9.9 0. 03 0.18 0.2–0.6 3. 2 3. 7 24.8 15.0Al2O 3 –TiC 0.80 9.1 0.05 0.24 0.2–0.6 2.8 22.0 23. 6 20.2Polycrystalline ... distance) and final values at a sliding distance of 5 m.TABLE 14 .3 Mean Values and Ranges of Adhesive Forces between Unlubricated and Lubricated SiO2-Coated Disks and Tips Made of Various...
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Handbook of Micro and Nano Tribology P16
... in Micromechanical Devices,” Tribol.Lett. 3, 233 – 238 .Mehregany, M., Howe, R.T., and Senturia, S.D. (1987), “Novel Microstructures for the in Situ Measure-ment of Mechanical Properties of Thin ... S.D., and Lang, G.H. (1992), “Measurement of Wear in Polysilicon Micromo-tors,” IEEE Trans. Electron Devices 39 , 1 136 –11 43. Michel, F. and Ehrfeld, W. (1998), “Microfabrication Technologies for ... Apparatus and Test Procedures • Test Samples 16 .3 Results and Discussion Micro/ Nanotribological Studies of Virgin, Coated, and Treated Silicon Samples • Micro/ Nanotribological Studies of Doped and...
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Handbook of Micro and Nano Tribology P5
... force upon separation of thetip and sample is often referred to as the pull-off force. Unfortunately, measuring the pull-off force doesnot directly give the work of adhesion. The pull-off force ... ϖδ,.PKaRKaRaRRK=−π−π=−π 33 2222 13 32ϖϖδϖ,.Burnham, N.A. and Kulik, A.J. “Surface Forces and Adhesion” Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: ... force. (This is an atomic analog of Lenz’s law, whichAkThvnnnnnn nn nn nn=−+−++−()−()+()+()+()++() 3 4 3 82 13 13 23 23 12 3 222 3 212 3 21222 3 21212 3 21222 3 212εεεεεεεε.©...
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Tài liệu Handbook of Micro and Nano Tribology P9 pptx
... Methods for Measuring Static and Dynamic Surface Forces Adhesion Forces • Force Laws • The Surface Force Apparatus and the Atomic Force Microscope 9 .3 van der Waals and Electrostatic Forces ... der Waals Forces • Electrostatic Forces 9.4 Solvation and Structural Forces: Forces Due to Liquid and Surface Structure Effects of Surface Structure • Effect of Surface Curvature and Geometry ... Fluctuation Forces: Forces between Soft, Fluidlike Surfaces9.6 Hydration Forces: Special Forces in Water and Aqueous Solutions Repulsive Hydration Forces • Attractive Hydrophobic Forces • Origin of...
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Tài liệu Colchero, J. et al. “Friction on an Atomic Scale”Handbook of Micro and Nano Tribology P6 Handbook of Micro/Nanotribology. Ed. Bharat ppt
... of the shearedisland. In the case of Figure 6. 23 the island area is 4900 nm2. The lateral force to shear the island is 5 nN.A shear strength of τ = 1 ± 0.2 MPa is deduced.Another class of ... of holes. With higher forces, we observe that particles of hydrocarbons are pulled out and sheared out of the scanning area while the fluorocarbons remainundeformed. Control films of pure AA and ... helium-, and X-ray diffractionFIGURE 6. 23 Topographic , (a) and (c), and friction (b) and (d), images of a double bilayer of Cd–arachidate. Scan size is2 × 2 µm2, the loading force is 4 nN for...
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Tài liệu Handbook of Micro and Nano Tribology P10 pptx
... Micro/ Nanoscratch Technique10.6 Nanoindentation and Microscratch Techniques for Adhesion Measurements, Residual Stresses, and Materials Characterization of Thin Films Adhesion Strength and ... film:(10.17)FIGURE 10 .30 Schematic of a cantilever microbeam deflected by nanoindenter loading mechanism for measure-ment of modulus of elasticity and yield strength of microbeam material. (From ... 299 30 8. With permission.)© 1999 by CRC Press LLCFIGURE 10 .33 Effect of relative Young’s moduli of the film and the substrate on the composite hardness for (a) asoft film on a hard substrate and...
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Tài liệu Handbook of Micro and Nano Tribology P1 ppt
... atomiclayers). These structures are generally lubricated with molecularly thin films. Micro- and nanotribological techniques are ideal for studying the friction and wear processes of micro- and nanostructures. ... 66100 10 0 .3 0.010 33 100 20 0 .3 0.021 33 Note: kz = EWT 3 /4L 3 , and ω0 = [kz/(mc + 0.24WTLρ)]1/2 where E is theYoung’s modulus, mc is the concentrated mass of the tip, and ρ is ... Role of Micro/ Nanotribology in Magnetic Storage Devices, MEMS, and Other MicrocomponentsReferencesIn this chapter, we first present the history of macrotribology and micro/ nanotribology and...
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Tài liệu Handbook of Micro and Nano Tribology P2 ppt
... to 31 0), a single square pulse of width 12 between 31 0 and 35 6, a triangle of period 40 between 35 6 and 39 6,a triangle of period 20 between 400 and 420, a triangle of period 12 between 430 and ... modification of Equation 2.19:(2 .31 )Integration of Equation 2 .31 now leads to(2 .32 )A second integration gives the deflection(2 .33 )Evaluating Equations 2 .32 and 2 .33 at the end of the cantilever, ... 4.9E- 03 3.1E-04 7.6E-05 1.9E-05100 nm 0.78 0.05 0.0 03 7.63E-04 1.91E-041 µm 7.81 0.49 0. 031 0.008 0.00210 µm 78. 13 4.88 0 .31 0.08 0.02100 µm 781.25 48. 83 3.05 0.76 0.19250 µm 19 53. 13 122.07...
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