Micromachining Techniques for Fabrication of Micro and Nano Structures Part 3 doc

... ()() () () ()                     2 22 132 32 32 2 34 14 12 34 32 2 4 33 2 115 3 . ln for for DD = 15. © 1999 by CRC Press LLC One of the properties of naturally occurring wiggly objects is that if a small part of the object ... a D a a n L D D a D L D D a a L D c DD L D c L D c c L =+ π = − () + π− () −                 ∫∫ − () − − () − (...

Ngày tải lên: 18/10/2013, 09:15

... M. (1992b), “Atomic-Force-Microscope Study of Polymer Lubricants on Silicon Surface,” Phys. Rev. Lett. 68, 33 23 33 26. Mate, C. M. (19 93) , “Nanotribology of Lubricated and Unlubricated Carbon ... overview of lubrication studies of polar and nonpolar lubricants and Lang- muir–Blodgett and chemically grafted films, using atomic force/friction force microscopy. 8.2 Nan...

Ngày tải lên: 18/10/2013, 09:15

... Appl. Phys. 75, 5741–5746. With permission.) Bhushan, B. Micro/ Nanotribology and Micro/ Nanomechanics of Magnetic ” Handbook of Micro/ Nanotribology. Ed. Bharat Bhushan Boca Raton: CRC Press ... (GPa) Macroscale b Nano at 2 mN MicroSample σ P-V a Microscale Initial Final Al 2 O 3 0.97 9.9 0. 03 0.18 0.2–0.6 3. 2 3. 7 24.8 15.0 Al 2 O 3 –TiC 0.80 9.1 0.05 0.24 0.2–0.6 2.8...

Ngày tải lên: 18/10/2013, 09:15

... in Micromechanical Devices,” Tribol. Lett. 3, 233 – 238 . Mehregany, M., Howe, R.T., and Senturia, S.D. (1987), “Novel Microstructures for the in Situ Measure- ment of Mechanical Properties of Thin ... S.D., and Lang, G.H. (1992), “Measurement of Wear in Polysilicon Micromo- tors,” IEEE Trans. Electron Devices 39 , 1 136 –11 43. Michel, F. and Ehrfeld, W. (1998), “Microfabric...

Ngày tải lên: 25/10/2013, 12:15

... force upon separation of the tip and sample is often referred to as the pull-off force. Unfortunately, measuring the pull-off force does not directly give the work of adhesion. The pull-off force ... ϖ δ , . P Ka R Ka R a R R K =− π −π =− π       33 222 2 13 3 2 ϖ ϖ δ ϖ , . Burnham, N.A. and Kulik, A.J. “Surface Forces and Adhesion” Handbook of Micro/ Nanotribology. E...

Ngày tải lên: 09/11/2013, 03:15

... Methods for Measuring Static and Dynamic Surface Forces Adhesion Forces • Force Laws • The Surface Force Apparatus and the Atomic Force Microscope 9 .3 van der Waals and Electrostatic Forces ... der Waals Forces • Electrostatic Forces 9.4 Solvation and Structural Forces: Forces Due to Liquid and Surface Structure Effects of Surface Structure • Effect of Surface Cur...

Ngày tải lên: 17/12/2013, 11:15

... of the sheared island. In the case of Figure 6. 23 the island area is 4900 nm 2 . The lateral force to shear the island is 5 nN. A shear strength of τ = 1 ± 0.2 MPa is deduced. Another class of ... of holes. With higher forces, we observe that particles of hydrocarbons are pulled out and sheared out of the scanning area while the fluorocarbons remain undeformed. Control films...

Ngày tải lên: 25/12/2013, 23:18

... Micro/ Nanoscratch Technique 10.6 Nanoindentation and Microscratch Techniques for Adhesion Measurements, Residual Stresses, and Materials Characterization of Thin Films Adhesion Strength and ... film: (10.17) FIGURE 10 .30 Schematic of a cantilever microbeam deflected by nanoindenter loading mechanism for measure- ment of modulus of elasticity and yield strength of mi...

Ngày tải lên: 25/12/2013, 23:18

... atomic layers). These structures are generally lubricated with molecularly thin films. Micro- and nanotribological techniques are ideal for studying the friction and wear processes of micro- and nanostructures. ... 66 100 10 0 .3 0.010 33 100 20 0 .3 0.021 33 Note: k z = EWT 3 /4L 3 , and ω 0 = [k z /(m c + 0.24WTLρ)] 1/2 where E is the Young’s modulus, m c is...

Ngày tải lên: 23/01/2014, 04:20

... to 31 0), a single square pulse of width 12 between 31 0 and 35 6, a triangle of period 40 between 35 6 and 39 6, a triangle of period 20 between 400 and 420, a triangle of period 12 between 430 and ... modification of Equation 2.19: (2 .31 ) Integration of Equation 2 .31 now leads to (2 .32 ) A second integration gives the deflection (2 .33 ) Evaluating Equations 2 .32...

Ngày tải lên: 27/01/2014, 14:20