... after annealing at 12 50ºC due to recrystallization of the layer. For comparison, in Table 3 the grain sizes of silicon and silicon carbide in plane (11 1) in layers Si (11 1) and β-SiС (11 1) are given. ... 0,40,60,8 1, 0 1, 2 1, 4 1, 6 10 20 30 40θ, degreeI, arb.un.SiС (11 1)Si (substrate)Si (11 1)Si (220)Si ( 311 )SiС (220)SiС ( 311 )b)0 ,1 0,30,50,70,9 1, 1 1, 3 515 253545θ, degreeI, arb.un.Si (11 1)SiC ... ( 511 )Si (3 31 )Si (5 31) Si (matrix)SiC (11 1)SiC ( 311 )SiC (220)SiC (422)SiC (3 31) SiC (400)0,00,5 1, 0 1, 52,02,5 10 20 30 40 50 60θ, degreeSi (11 1)Si (220)Si ( 311 )Si...