... (3015-3022), ISSN: 0021- 897 9 Yilbas, B. S., Shuja, S. Z. ( 199 9). Laser short-pulse heating of surfaces, Journal of Physics D: Applied Physics, Vol. 32 No. 16, (August, 199 9), pp. ( 194 7- 195 4), ISSN: 0022-3727 ... like those described in sections 3 and 4, assessing the heat 8 Heat Transfer - Engineering Applications Heat Transfer – Engineering Applications 44result. Therefore, the validity of the ... low-active or inactive plasma particles leads to changed etching parameters (Miyata Koji et al., 199 6; Komine Kenji et al., 199 6; McLane et al., 199 7); the charged particle parameters are affected...