... nm108 nm –1 00 nm50 nm56 nm –5 0 nm50 nm55 nm –5 0 nmDK532X_book.fm Page 101 Friday, November 10, 2006 3:31 PM© 2007 by Taylor & Francis Group, LLC102 Bio-MEMS: Technologies and Applications While ... Francis Group, LLC108 Bio-MEMS: Technologies and Applications which has become a major challenge for electronic, optoelectronic, biological, and sensing applications [ 1–4 ,51,52]. In general, local ... optics and biolog-ical applications [3 2–5 6]. Progress in NIL technology is rapid. Readers whoare interested in various aspects of NIL technology are referred to recentreview papers and books [ 8–1 1]....