... effect of suchthin oxide film on the electrical resistance measurement of SiNWshas not been clarified.In the present work, the direct measurement of electrical resis-tance of a silicon nanowire ... Electrical conductivity measurement of silicon wire prepared by CVD Hiroshi Suzuki, Hiroshi Araki, Masahiro Tosa, Tetsuji Noda*National ... temperature.Fig. 7 is a schematic drawing of the electrical measurement of the SiNW covered with the silicon oxide layer. The total resistance,R, is the sum of those of SiNW and silicon oxide asR ¼ R1þ...